Ceramic product thread machining method

Abstract

The invention discloses a ceramic product thread machining method. The method aims to overcome the defects that the thread machining efficiency of a ceramic product is low, and the service life of a cutter is short. The method comprises the following steps that a, a ceramic product with a machining hole is placed on a rotating disc; b, centering adjustment is conducted on the machining hole, so that the axis of the machining hole coincides with the rotating axis of the rotating disc, and the ceramic product is clamped; c, a cutter extends into the machining hole, and a plurality of cutting edges arranged at equal intervals are arranged on the cutter; d, while the cutter rotates to approach the inner wall of the machining hole, the cutting edges make contact with the inner wall of the machining hole for grinding, the cutter moves upwards, and the rotating disc drives the ceramic product to rotate, so that threads are machined; e, the cutter is separated from the inner wall of the machining hole and returns downwards to the initial position, and the rotating disc rotates reversely to return to the initial position; and f, the steps d to e are repeated for multiple times, and the depth of the threads, ground by the cutting edges, on the inner wall of the machining hole is increased by m every time until the thread machining is finished.

Description

technical field [0001] The invention relates to the technical field of ceramic product processing, more specifically, it relates to a thread processing method for ceramic products. Background technique [0002] At present, products made of advanced ceramic materials are gradually changing from functional parts to structural parts, and ceramic materials are widely used in semiconductor equipment due to their wear resistance, insulation, and high hardness, such as photolithography machines, deposition equipment, plasma injection machines, Packaging inspection, etc., and gradually replace the metal parts. As a structural part, an assembly and a fixed structure are required. At present, the connection and fixation of the assembly is mainly a bolt structure. Therefore, there is more and more demand for processing threads on ceramic parts, and with the expansion of the application field of parts, the types of threads are complex, and the needs for depth and high precision are inc...

AI Technical Summary

Problems solved by technology

Because ceramics are brittle materials, metal thread processing methods, such as tapping and cold rolling, cannot be used. The threads of traditional ceramic materials are processed by grinding, which takes a long time to process and consumes fast tools. When processing deep threads It is easy to burn the knife, resulting in a low pass rate

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