LTCC substrate material applicable to high frequency and preparation method thereof

A substrate and high-frequency technology, applied in the field of LTCC substrate materials and their preparation, can solve the problems of using in low-frequency occasions, and achieve the effects of wide application range, low dielectric loss and good designability

Active Publication Date: 2021-11-30
NAT UNIV OF DEFENSE TECH +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] The invention provides a LTCC substrate material suitable for high frequency and its preparation method, which is used to overcome the defects that the LTCC substrate material of the low softening point glass / ceramic system in the prior art can only be used in low frequency occasions and the like

Method used

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  • LTCC substrate material applicable to high frequency and preparation method thereof
  • LTCC substrate material applicable to high frequency and preparation method thereof
  • LTCC substrate material applicable to high frequency and preparation method thereof

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preparation example Construction

[0034] The present invention also proposes a preparation method suitable for high-frequency LTCC substrate materials, such as figure 1 shown, including the following steps:

[0035] S1: Weigh CaO, B 2 o 3 , SiO 2 , MgO, TiO 2 、Al 2 o 3 and P 2 o 5 , mixed, smelted, and then poured into deionized water to obtain glass slag;

[0036] S2: Weigh CaO and SiO according to the stoichiometric ratio 2 , mixed and heated to synthesize CaSiO 3 ceramics;

[0037] The stoichiometric ratio refers to the ratio of the coefficients in the chemical reaction equation.

[0038] The present invention synthesizes CaSiO by a solid phase reaction method 3 ceramics.

[0039] S3: Weigh CaO and B according to the stoichiometric ratio 2 o 3 , mix well, heat synthesis for the first time, grind the synthesized product into powder again, and then carry out the second heat synthesis to obtain CaB 2 o 4 ceramics;

[0040] The stoichiometric ratio refers to the ratio of the coefficients in t...

Embodiment 1～12

[0062] This embodiment provides a kind of LTCC substrate material suitable for high frequency, and this LTCC substrate material is made of CaO-B 2 o 3 -SiO 2 System glass-ceramics and mixed ceramics prepared, CaO-B 2 o 3 -SiO 2 See Table 2 for the mass ratio of glass-ceramics and mixed ceramics in the system;

[0063] CaO-B 2 o 3 -SiO 2 System glass ceramics with CaO, B 2 o 3 , SiO 2 , MgO, TiO 2 、Al 2 o 3 and P 2 o 5 Prepared as a raw material, the hybrid ceramic is made of CaSiO 3 Ceramic and CaB 2 o 4 Ceramic mix.

[0064] CaO, B 2 o 3 , SiO 2 , MgO, TiO 2 、Al 2 o 3 and P 2 o 5 The mass ratio of is shown in Table 1;

[0065] CaSiO 3 Ceramic and CaB 2 o 4 The mass ratio of ceramics is shown in Table 2.

[0066] This embodiment also provides a method for preparing the above-mentioned LTCC substrate material suitable for high frequency, including the following steps:

[0067] S1: Weigh CaO and B according to mass ratio 2 o 3 , SiO 2 , MgO, Ti...

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Abstract

The invention discloses an LTCC substrate material applicable to high frequency and a preparation method thereof. The LTCC substrate material is a microcrystalline glass / ceramic system material, wherein microcrystalline glass with a low softening point is used as a sintering aid, the content of an amorphous glass phase in the sintered material is reduced by utilizing devitrification, and the quality factor of the material is effectively improved. The dielectric loss of the LTCC substrate material is lower than 1.5 * 10<-3> when the dielectric loss of the LTCC substrate material is larger than 10 GHz, so the LTCC substrate material is superior to current mainstream commercial LTCC materials and can meet requirements on high-frequency application to electronic equipment. The preparation method provided by the invention is simple in process, short in preparation period and low in cost, and the prepared LTCC substrate material is excellent in performance.

Description

technical field [0001] The invention relates to the technical field of electronic ceramic materials and its manufacture, in particular to an LTCC substrate material suitable for high frequency and a preparation method thereof. Background technique [0002] Low temperature co-fired ceramics (Low Temperature Co-fired Ceramics, LTCC) technology is an ideal packaging technology to realize the miniaturization and chipping of electronic components. Using LTCC technology, analog circuits, digital circuits, optoelectronic devices and microwave devices can be assembled together, thus providing an excellent solution for the miniaturization, integration and high reliability of electronic equipment. and other fields have broad application prospects. [0003] According to the characteristics and requirements of LTCC technology, LTCC substrate materials usually need to have a low sintering temperature (the melting point of high-conductivity metal conductors such as gold and silver is usu...

Claims

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Application Information

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IPC IPC(8): C03C10/04C03C1/02C03B19/06
CPCC03C10/00C03B19/06C03C1/02
Inventor 张为军陈兴宇毛海军刘卓峰张书齐林克欢
Owner NAT UNIV OF DEFENSE TECH
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