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4*4 optical switch array based on organic-inorganic hybrid integration

An optical switch array and hybrid integration technology, applied in the field of optical communication, to achieve the effects of reducing process cost, improving waveguide morphology, and reducing process complexity

Active Publication Date: 2021-11-09
JILIN UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, in terms of signal transmission and switching speed, there is a bottleneck in the electronics field, especially in terms of communication bandwidth

Method used

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  • 4*4 optical switch array based on organic-inorganic hybrid integration
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  • 4*4 optical switch array based on organic-inorganic hybrid integration

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Embodiment 1

[0055] Thermal oxidation was performed on the Si substrate to grow a layer of SiO with a thickness of 5 μm 2 as the lower cladding;

[0056] to SiO 2 The lower cladding layer is etched by ICP, and the top view is the designed 4×4 optical switch array device, and the groove structure with an etching width and etching depth of 2.5 μm (the structure of the 4×4 optical switch array that is attached Figure 9 The structure formed by "cascading 5 groups of 2×2 switching units designed above" as shown can be manufactured by Henan Shijia Photon Technology Co., Ltd.);

[0057] The waveguide core material SU-8 2002 is spin-coated on the groove structure, the spin coating speed is 5000r / min, after filling the groove structure with a depth of 2.5μm, the core material will be on the top of the core layer and not etched SiO 2 A layer with a thickness of about 2.0 μm overflows from the plane where the lower cladding is located;

[0058] After spin-coating the core layer, perform pre-bak...

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Abstract

The invention discloses a 4*4 optical switch array based on organic-inorganic hybrid integration, and belongs to optical communication. Along the propagation direction of light, the optical switch array is composed of a group I, a group II, a group III, a group IV and a group V of 2*2 optical switch units. Each 2*2 optical switch unit is composed of a front coupling area, a rear coupling area and two straight waveguides which are connected between the front coupling area and the rear coupling area and are L in length, one straight waveguide serves as a modulation arm, temperature difference is generated between the two straight waveguides by changing the temperature of the modulation arm, and therefore the phase of transmission light in the waveguides is changed. From the bottom to the top, the optical switch array is composed of a Si substrate, a SiO2 lower cladding layer with a rectangular groove type structure, an SU-8 2002 waveguide core layer filled in a rectangular groove, and a PMMA upper cladding layer. According to the 4*4 switch array, light transmission from each input port to each output port can be realized through modulation of different modulation arms, and the loss of the 4*4 switch array in each working state is below 0.07 dB.

Description

technical field [0001] The invention belongs to the technical field of optical communication, and specifically relates to a 4×4 optical switch array based on organic-inorganic hybrid integration, which realizes better light transmission and lower loss in terms of performance. Background technique [0002] In recent years, the electronics industry has made revolutionary progress, and breakthroughs in semiconductor materials, planar microfabrication, and integrated circuit design have played key roles, which have made large-scale, low-cost integrated circuits possible. However, in terms of signal transmission and switching speed, there are bottlenecks in the field of electronics, especially in terms of communication bandwidth. In order to solve these problems, technologies based on optoelectronic applications have become a way to break through the bottleneck. Compared with electronic devices, optoelectronic devices are smaller and lighter. In the field of communication, they ...

Claims

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Application Information

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IPC IPC(8): G02B6/12G02B6/35
CPCG02B6/12G02B6/3546
Inventor 阎冠文张大明尹悦鑫王春雪许崇前李悦
Owner JILIN UNIV
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