Four-dimensional high-temporal-spatial-resolution ultrafast photon electron multimode detection device

Abstract

The invention relates to a four-dimensional high-temporal-spatial-resolution ultrafast photon electron multimode detection device, and belongs to the field of laser micro-nano machining and material science application. According to the invention, through a pumping detection technology, focused photons from femtosecond to picosecond are accurately focused to a micro-nano scale sample, and detection is carried out through organic combination of an ultrafast scanning electron microscope and a CCD; a cooling filament is excited by ultrafast laser to form an ultrafast electron beam for observation; the CCD is irradiated by ultrafast laser for observation, so that multimode detection of ultrafast electrons and ultrafast photons can be realized at the same time; detection electrons can be regulated and controlled, so that the detection electrons and photons jointly act on a sample, and multi-mode ultrafast observation of the synergistic effect process of the electrons and the photons is realized; and micro-nano structure processing or modification can be carried out on a sample, and in-situ measurement processing or modified ultrafast carrier dynamics research can be carried out.

Description

technical field [0001] The invention relates to a four-dimensional high-time-space resolution ultrafast photon electronic multi-mode detection device, which belongs to the field of laser micro-nano processing and material science applications. Background technique [0002] The study of ultrafast dynamics to explore the microstructure of matter and the process of physical and chemical transient changes has opened up new development directions for different disciplines, especially in the field of ultrafast laser manufacturing. Ultrafast laser has the characteristics of ultra-powerful, ultra-fast, and ultra-precise, and is one of the frontiers and important growth points of manufacturing technology. Through the interaction between laser and materials, changing the state and properties of materials, and realizing shape control from micron to nanoscale or across scales, has attracted much attention for many years. The interaction between femtosecond laser and material is a nonli...

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Problems solved by technology

[0003] The purpose of the present invention is to solve the problem that the dynamic process of ultrafast lasers cannot be observed in the prior art, and thus the processing results cannot be detected, and to provide a four-dimensional high-time-space resolution ultrafast photonic electronic multi-mode detection device; the device can measure in situ in real time Ultrafast laser micro-nano processing and modification process, and the dynamic process of carriers in micro-nano optoelectronic devices

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