Extreme ultraviolet radiation control method and device, electronic device and extreme ultraviolet radiation system
A technology of extreme ultraviolet radiation and a control method, which is applied in the fields of devices, electronic equipment, extreme ultraviolet radiation systems, and extreme ultraviolet radiation control methods, can solve the problems of difficult control, low conversion efficiency of plasma extreme ultraviolet radiation, and difficulty in increasing light source power. It can improve the degree of ionization, reduce the production cost and improve the conversion efficiency.
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[0039] In order to make the purpose, technical solution and advantages of the present application clearer, the present application will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present application, and are not intended to limit the present application.
[0040] In one of the examples, as figure 1 As shown, (a) is a schematic diagram of the principle of a traditional extreme ultraviolet radiation device, in which the pre-pulse laser and the main pulse laser are two-way lasers, respectively emitted by two different pre-pulse lasers and main pulse lasers, (b) is Schematic diagram of the principle of the extreme ultraviolet radiation device of the embodiment of the present application, wherein the pre-pulse laser and the main pulse laser are emitted by the same laser, and there is a time delay between the pre-pulse laser and t...
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