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Plasma light source cavity for laser maintenance, and preparation method thereof

A plasma and light source cavity technology, applied in the field of plasma light sources, can solve problems such as uneven service life, affecting detection efficiency and detection reliability, and achieve the effects of prolonging life, reducing evaporation, and preventing excessive instantaneous arc

Pending Publication Date: 2021-06-01
CHANGZHOU NEWPHENIX LIGHTING MFR
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Since most of the light sources used are gas discharge light sources, and the service life of each specification lamp is different, it seriously affects the detection efficiency and detection reliability.

Method used

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  • Plasma light source cavity for laser maintenance, and preparation method thereof
  • Plasma light source cavity for laser maintenance, and preparation method thereof
  • Plasma light source cavity for laser maintenance, and preparation method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0028] Embodiment one: refer to figure 1 , a plasma light source cavity for laser maintenance, comprising a quartz cavity 1, an electrode connecting body, and a filling gas in the cavity.

[0029] Quartz cavity 1 is formed of quartz glass material with transmittance not less than 70% in the wavelength range of 170nm to 2300nm, including sealing area 5 and bulb 11; sealing area 5 is a tubular tube communicating with the end of bulb 11 The bulb 11 can be spherical, ellipsoidal, cylindrical, square, rectangular and other shapes suitable for laser pumped plasma, and the inner cavity of the bulb 11 is the ionization cavity 3 . The wall thickness of the middle part of the bulb 11 can be greater than the wall thickness of the end, which can play a role of refraction and help to gather the laser beam.

[0030] An electrode connector for plasma triggering is housed in the quartz chamber 1 for initiating plasma in a given chamber to generate a discharge arc or corona discharge. The el...

Embodiment 2

[0038] Embodiment two: refer to figure 2 , a plasma light source cavity for laser maintenance, comprising a quartz cavity 1, two electrode connectors, and filling gas in the cavity.

[0039]The quartz cavity 1 is formed of a quartz glass material with a transmittance not less than 70% in the wavelength range of 170nm to 2300nm, including a first sealing area 51, a second sealing area 52 and a bulb 11; the first sealing area 51 and the second sealing area 52 are both tubular bodies, respectively connected to the two ends of the bulb 11, the bulb 11 can be spherical, ellipsoidal, cylindrical, square, rectangular and other shapes suitable for laser pumped plasma, The inner cavity of bulb 11 is ionization cavity 3 . The wall thickness of the middle part of the bulb 11 can be greater than the wall thickness of the end, which can play a role of refraction and help to gather the laser beam.

[0040] Encapsulate two electrode connectors for plasma triggering in the quartz cavity 1,...

Embodiment 3

[0048] Embodiment three: refer to image 3 , and the difference from the second embodiment is that the angle between the axes of the first electrode body 61 and the second electrode body 62 is α. α is between 0° and 30°, determined according to product requirements.

[0049] In this way, the tip of the first electrode tip 71 and the second electrode tip 72 are staggered, which can prevent the instantaneous arc from being too strong, and is conducive to maintaining a stable luminous intensity and spectrum under the excitation of the external laser; at the same time, it can reduce the electrode evaporation caused by the transient arc. Phenomenon, prolong the life of the electrode.

[0050] The preparation method of the cavity is the same as that of the second embodiment.

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Abstract

The invention relates to the technical field of plasma light sources, and especially relates to a plasma light source cavity for laser maintenance. The plasma light source cavity comprises a quartz cavity, an electrode connector and filling gas in the cavity. The quartz cavity comprises a sealing area and a bulb; the sealing area is a tubular body communicated with the end part of the bulb, and the inner cavity of the bulb is an ionization cavity; and one or more electrode connectors used for plasma triggering are packaged in the quartz cavity, each electrode connector comprises a conductive column, a molybdenum sheet and an electrode body, an electrode tip is arranged at the head end of each electrode body, the head of each electrode tip is a conical tip, the molybdenum sheet and the conductive column are sequentially welded to the tail end of each electrode body, the electrode tip is located in the bulb, the molybdenum sheet is located at the press sealing position of the sealing area, and the conductive column is located outside the quartz cavity. The plasma light source cavity can maintain triggering of the plasma and limit gas used for generating the plasma, and stable luminous intensity and spectrum are maintained.

Description

technical field [0001] The invention relates to the technical field of plasma light sources, in particular to a plasma light source cavity for laser maintenance and a preparation method thereof. Background technique [0002] With the continuous development of the semiconductor industry, especially the integrated circuit industry, the size of the manufactured devices is also decreasing, and the requirements for the light source required to detect these devices are also getting higher and higher. In particular, the light emitted by the light source is required to have a range from ultraviolet to far infrared. (wavelength 170nm ~ 2300nm) ultra-high brightness, ultra-wide spectrum. At present, in most cases, this light source needs to be realized through the combined use of multiple light sources (such as deuterium lamps, mercury lamps, xenon lamps, tungsten halogen lamps, etc.). Since most of the light sources used are gas discharge light sources, and the service life of lamps...

Claims

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Application Information

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IPC IPC(8): H01J37/32
CPCH01J37/32458H01J37/32798H01J37/32807
Inventor 丁新凤
Owner CHANGZHOU NEWPHENIX LIGHTING MFR
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