Electronic gas tail gas intelligent recovery device and method

Abstract

The invention relates to the technical field of electronic gas tail gas recovery, and particularly relates to an intelligent electronic gas tail gas recovery device and method. The device comprises a base plate and a console, wherein the console is arranged at one end of the top of the base plate. The device further comprises a first processing mechanism, a detection mechanism, a second processing mechanism, a third processing mechanism, a gas dehumidification mechanism and an electronic gas collection tank, wherein the first processing mechanism is arranged at the other end of the top of the base plate, the second processing mechanism and the third processing mechanism are arranged at the top of the base plate and located on one side of the console, the gas dehumidification mechanism is arranged at the top of the base plate and located on the other side of the console, the electronic gas collection tank is installed at the top of the base plate and located on the side edge of the first processing mechanism, and the first processing mechanism comprises a first processing box. The device is compact in structure, continuous in operation, convenient to move, cost-saving and high in recovery efficiency.

Description

technical field [0001] The invention relates to the technical field of electronic gas tail gas recovery technology, in particular to an electronic gas tail gas intelligent recovery device and method. Background technique [0002] Electronic gas is an indispensable basic supporting raw material in the development of integrated circuits, optoelectronics, microelectronics, especially VLSI, liquid crystal display devices, semiconductor light-emitting devices and semiconductor materials. It is called the "blood" of the electronics industry And "food", its purity and cleanliness directly affect the quality, integration, specific technical indicators and yield of optoelectronics and microelectronic components, and fundamentally restrict the precision and accuracy of circuits and devices. Whether the gas is used as a cleaning agent or an etchant, the utilization rate is only 30-70%, so the electron gas tail gas contains a large amount of unused electron gas and the (C-H)n polymer ge...

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Problems solved by technology

[0002] Electronic gas is an indispensable basic supporting raw material in the development of integrated circuits, optoelectronics, microelectronics, especially VLSI, liquid crystal display devices, semiconductor light-emitting devices and semiconductor materials. It is called the "blood" of the electronics industry And "food", its purity and cleanliness directly affect the quality, integration, specific technical indicators and yield of optoelectronics and microelectronic components, and fundamentally restrict the precision and accuracy of circuits and devices. Whether the gas is used as a cleaning agent or an etchant, the utilization rate is only 30-70%, so the electron gas tail gas contains a large amount of unused electron gas and the (C-H)n polymer generated during the cleaning and etching process, and most of the electron gas is Greenhouse gas is the largest source of greenhouse gas emissions in the semiconductor industry: electronic gas tail gas emissions not only cause waste of electronic gases but also affect environmental protection

[0003] Existing electronic gas tail gas recovery devices are generally directly equipped with multiple spray towers to remove impurities in the gas through continuous spraying of the gas, resulting in numerous operating procedures, high equipment costs, cumbersome operations, and low recovery efficiency. Moreover, it is easy to cause gas leakage during multiple operating procedures, which affects the recovery effect of gas. Therefore, we propose an electronic gas tail gas intelligent recovery device and method

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