Precious metal nanocone SERS substrate for detecting novel coronavirus and preparation method
A coronavirus and nanocone technology, which is applied in the field of laser Raman spectroscopy and virus detection, can solve the problems of cumbersome and time-consuming capture methods, low capture efficiency, and weak Raman signal intensity, and achieve high capture efficiency and detection accuracy , Improve capture efficiency and avoid false negative effects
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[0032] S1. By the method of self-assembly, the surface of the substrate is covered with a single layer of polystyrene microspheres. The diameter of the polystyrene microspheres is 100nm. The diameter of the same batch of polystyrene microspheres is highly consistent and the particle size is standard. The deviation is less than 5%;
[0033] S2. Smoothly bend the periphery of the substrate for 20 degrees toward the center of the surface where the polystyrene microspheres are located, and then place the curved substrate in a reactive ion etching device;
[0034] S3, using sulfur hexafluoride as the reaction gas, under the conditions of gas flow rate 30 sccm, cavity pressure 15 Pa, and etching power 150 watts, perform reactive ion etching on the substrate surface where the polystyrene microspheres are located, to the surface of the substrate Nanocones are formed and polystyrene microspheres are completely removed;
[0035] S4. Maintain the curved state of the substrate, deposit n...
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