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Welding method of WTi target material assembly

A welding method and target material technology, applied in welding equipment, welding/welding/cutting items, non-electric welding equipment, etc., can solve problems such as short service life, unsatisfactory sputtering effect, and easy cracks in WTi

Pending Publication Date: 2020-10-30
KONFOONG MATERIALS INTERNATIONAL CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The thermal expansion coefficients of the WTi target and the aluminum alloy material are several times different. After diffusion welding, the two will have a large deformation. Shooting effect is not ideal

Method used

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  • Welding method of WTi target material assembly

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0037] This embodiment provides a welding method for a WTi target assembly. The welding method includes: assembling a WTi target 2, an aluminum back plate 3 and a cover plate 1, and then putting them into a sheath for degassing treatment and welding;

[0038] Wherein, the welding surface of the WTi target 2 is provided with grooves; the welding surface of the aluminum back plate 3 is subjected to alkali treatment; the assembly is that the aluminum back plate 3 and the cover plate 1 are symmetrically assembled with the WTi target 2 as the center, Such as figure 1 As shown; the width of the groove is 3mm; the vertical depth of the groove is 1mm; the distance between the grooves is 4mm; the groove is a rectangular groove; Treatment; the alkali solution is sodium hydroxide solution; the concentration of the alkali solution is 10mol / L; the time of the alkali treatment is 15min; the temperature of the degassing treatment is 400°C; the heat preservation of the degassing treatment T...

Embodiment 2

[0041] This embodiment provides a welding method for a WTi target assembly. The welding method includes: assembling a WTi target, an aluminum back plate and a cover plate, and then placing them in a sheath for degassing and welding in sequence;

[0042] Wherein, the welding surface of the WTi target is provided with grooves; the welding surface of the aluminum back plate is subjected to alkali treatment; the assembly is that the aluminum back plate and the cover plate are assembled symmetrically with the WTi target as the center; the width of the groove 2mm; the vertical depth of the groove is 1.5mm; the distance between the grooves is 5mm; the groove is an inverted triangular groove; It is potassium hydroxide solution; the concentration of the alkali solution is 6mol / L; the time of the alkali treatment is 25min; the temperature of the degassing treatment is 310°C; the holding time of the degassing treatment is 3h; The final vacuum degree of degassing treatment is 4×10 -3 Pa;...

Embodiment 3

[0045] This embodiment provides a welding method for a WTi target assembly. The welding method includes: assembling a WTi target, an aluminum back plate and a cover plate, and then placing them in a sheath for degassing and welding in sequence;

[0046] Wherein, the welding surface of the WTi target is provided with grooves; the welding surface of the aluminum back plate is subjected to alkali treatment; the assembly is that the aluminum back plate and the cover plate are assembled symmetrically with the WTi target as the center; the width of the groove The vertical depth of the groove is 0.5mm; the distance between the grooves is 3mm; the groove is an inverted trapezoidal groove; the alkali treatment is to use alkali solution to process the welding surface of the aluminum back plate; It is sodium hydroxide solution; the concentration of the alkali solution is 12mol / L; the time of the alkali treatment is 10min; the temperature of the degassing treatment is 477°C; the holding ti...

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Abstract

The invention relates to a welding method of a WTi target material assembly. The welding method comprises the following steps that a WTi target material, an aluminum back plate and a cover plate are assembled and then placed into a sheath to be subjected to degassing treatment and welding in sequence; a groove is formed in the welding surface of the WTi target material; the welding surface of thealuminum back plate is subjected to alkali treatment; and assembling is conducted in a manner that the aluminum back plate and the cover plate are symmetrically assembled by taking the WTi target material as the center. According to the welding method, the groove is formed in the welding surface of the target material, the welding surface of the back plate is subjected to alkali treatment, and a specific assembling mode is adopted, so that effective welding of the WTi target material and the aluminum back plate is realized, the internal stress is obviously reduced, no crack is generated, the sputtering effect is enhanced, and the service life is long.

Description

technical field [0001] The invention relates to the field of target material welding, in particular to a welding method for WTi target material components. Background technique [0002] The WTi target is made by powder metallurgy sintering. After sintering, the hardness is relatively high, and the product is relatively brittle. It is not easy to carry out diffusion welding with aluminum alloy or copper alloy backplane materials, and it is prone to cracks or even cracks when subjected to large stress. [0003] CN103834923A discloses a method for making a tungsten-titanium target. In this method, after loading tungsten-titanium alloy powder into a vacuum hot-pressing sintering mold, the tungsten-titanium alloy powder located in the edge area of ​​the vacuum hot-pressing sintering mold is first subjected to a second step. After the first compaction, the second compaction is performed on the entire tungsten-titanium alloy powder. After the first compaction and the second compact...

Claims

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Application Information

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IPC IPC(8): B23K20/00B23K20/14B23K20/24C23G1/20B23K103/18
CPCB23K20/001B23K20/14B23K20/24B23K2103/18C23G1/205
Inventor 姚力军边逸军潘杰王学泽廖培君罗明浩
Owner KONFOONG MATERIALS INTERNATIONAL CO LTD
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