Interdigital back contact heterojunction solar cell based on LPCVD high-efficiency amorphous silicon doping technology

Abstract

The invention provides an interdigital back contact heterojunction solar cell based on an LPCVD high-efficiency amorphous silicon doping technology. The solar cell comprises a crystalline silicon substrate, and the front surface of the crystalline silicon substrate comprises at least one passivation layer; and the back surface of the crystalline silicon substrate comprises a tunneling oxide layer,n+ doped amorphous silicon layers / p+ doped amorphous silicon layers which are alternately arranged, a laser slotting region, a passivation layer and a metal electrode from inside to outside. A cell structure combining a back contact mode and a heterojunction mode is adopted, and a doped amorphous silicon growth mode is optimized, so the passivation capability and the contact capability of the solar cell are improved under the condition that the characteristic of IBC high short-circuit current is reserved, and the manufacturing cost is effectively reduced at the same time. Through verification, the conversion efficiency of the mass production HBC cell adopting the structure provided by the invention reaches 25% or above, and is higher than the mass production conversion efficiency of the current mainstream heterojunction or TOPCon technology of 23.5%, and the open-circuit voltage reaches 710 mV or more.

Description

Technical field [0001] The invention relates to the technical field of solar cells, and provides a method for growing a low-cost, high-quality doped amorphous silicon passivation layer. It is especially suitable for the formation of doped amorphous silicon passivation layer in interdigital back contact heterojunction solar cells (HBC). Background technique [0002] In recent years, the energy crisis and environmental pressure have promoted the rapid development of solar cell research and industry. At present, crystalline silicon solar cells are the most mature and widely used solar cells, accounting for more than 90% of the photovoltaic market, and will occupy a dominant position for a long time in the future. In the rapidly developing photovoltaic industry, the improvement of photoelectric conversion efficiency and the reduction of cell manufacturing costs have become the foundation of the entire photovoltaic industry. With the continuous advancement of photovoltaic cell techno...

AI Technical Summary

Problems solved by technology

The current mainstream technology is the PECVD technology route. Meyer Burger, Ideal Energy, and American Applied Materials are the current main suppliers. The cost of equipment is extremely high, the cost of battery production is high, and the road to mass production is relatively long.

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