Preparation method of nickel-chromium-aluminum-yttrium-silicon alloy target material
A nickel-chromium-aluminum-yttrium-silicon alloy technology, which is applied in metal material coating process, ion implantation plating, coating, etc., can solve the problems of high cost, uneven composition of alloy targets, etc., and achieve the solution of shrinkage cavity and loose effect
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preparation example Construction
[0021] The invention provides a method for preparing a nickel-chromium-aluminum-yttrium-silicon alloy target, the preparation method comprising the following steps:
[0022] Put nickel and chromium together in the crucible in the first vacuum melting furnace and melt to obtain nickel-chromium master alloy melt; mix aluminum and yttrium in the crucible in the second vacuum melting furnace and melt together to obtain aluminum-yttrium master alloy melt liquid; the nickel-chromium master alloy melt, aluminum-yttrium master alloy melt and silicon are mixed together and placed in a crucible in a third vacuum melting furnace for melting to obtain a nickel-chromium-aluminum-yttrium-silicon alloy melt.
[0023] In this example, according to the difference in melting point and density between the five metal elements of nickel, chromium, aluminum, yttrium, and silicon, in order to avoid incomplete smelting or component segregation, a step-by-step smelting method is adopted for smelting. ...
Embodiment 1
[0035] (1) Put the mixed nickel and chromium with a mass ratio of 3:1 in a vacuum of 6×10 -2 Smelting in the magnesia crucible in the smelting furnace of Pa, after the temperature of the melt in the crucible rises to 1700°C, it is kept for 20 minutes to obtain the nickel-chromium master alloy melt;
[0036] (2) Put aluminum and yttrium with a mass ratio of 10:1 together in a vacuum of 6×10 -2 Smelting in the magnesia crucible in the smelting furnace of Pa, after the temperature of the melt in the crucible rises to 800°C, keep it warm for 30 minutes to obtain the aluminum-yttrium master alloy melt;
[0037] (3) The mixed nickel-chromium master alloy melt, aluminum yttrium master alloy melt and silicon with a mass ratio of 6:1:0.02 are placed together in a vacuum of 6×10 -2 Smelting in the magnesia crucible in the smelting furnace of Pa, after the temperature of the molten liquid in the crucible rises to 1550°C, it is kept for 20 minutes to obtain the nickel-chromium-aluminum-ytt...
Embodiment 2
[0041] (1) Put the mixed nickel and chromium with a mass ratio of 5:1 together in a vacuum of 8×10 -2 Smelting in the magnesia crucible in the smelting furnace of Pa, after the temperature of the melt in the crucible rises to 1750°C, keep it warm for 30 minutes to obtain the nickel-chromium master alloy melt;
[0042] (2) Put aluminum and yttrium with a mass ratio of 20:1 together in a vacuum of 8×10 -2 Melting in the magnesia crucible in the smelting furnace of Pa, after the temperature of the melt in the crucible rises to 1200°C, keep it warm for 20 minutes to obtain the aluminum-yttrium master alloy melt;
[0043] (3) The mixed nickel-chromium master alloy melt, aluminum yttrium master alloy melt and silicon with a mass ratio of 6.9:1:0.06 are placed together in a vacuum of 8×10 -2 Smelting in the magnesia crucible in the smelting furnace of Pa, after the temperature of the molten liquid in the crucible rises to 1700°C, it is kept for 30 minutes to obtain the nickel-chromi...
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