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Reduction furnace bell jar inner wall spraying device and spraying method and reduction furnace

A technology of spraying device and bell jar, which is applied in the direction of spraying device, device for coating liquid on the surface, coating, etc., which can solve the problems of easy oxidation of coating and increase of spraying cost, and achieve oxidation avoidance, high bonding strength, retention Effect of Intrinsic Performance

Active Publication Date: 2020-07-31
ASIA SILICON QINGHAI +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In the existing spraying device for the inner wall of the bell jar of the reduction furnace, the spray gun and the inner wall of the bell jar are exposed to the atmospheric environment. Due to the contact with oxygen, there is a problem that the coating is easily oxidized during the spraying process.
And the inner wall of the bell jar is at room temperature before spraying, which requires higher spraying conditions (temperature and pressure), which will undoubtedly increase the cost of spraying

Method used

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  • Reduction furnace bell jar inner wall spraying device and spraying method and reduction furnace

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Effect test

Embodiment approach

[0061] As a preferred embodiment of the present invention, the rotating member 20 includes a rotating mechanism and a driving mechanism, the driving mechanism is used to drive the rotating mechanism to rotate, and the rotating mechanism is connected to the flange on the bell 10 .

[0062] Wherein, the driving mechanism may include a driving motor, a power output shaft of the driving motor is provided with a protrusion, and the rotating mechanism includes a gear plate, and the gear plate is provided with a groove matched with the protrusion. After the drive motor is started, the power output shaft rotates to drive the gear plate to rotate, and the gear plate is bolted to the flange on the bell 10 to drive the bell 10 to rotate.

[0063] As an optional embodiment of the present invention, the sealing member 30 includes a rotating portion 31 and a stationary portion 32, and the rotating portion 31 is connected with the stationary portion 32;

[0064] The rotating part 31 is conne...

Embodiment 1

[0100] This embodiment provides a device for spraying the inner wall of a bell jar of a reduction furnace, specifically as follows figure 1 As shown, it includes a bell jar 10, a rotating part 20, a sealing part 30, a vacuuming part 40, an exhaust part 50, a cold gas power spraying part 60 and a control part (not shown in the figure);

[0101] The rotating part 20 is arranged on the outside of the bell jar 10; the sealing part 30 is arranged at the opening of the bell jar 10; Inside the bell 10 and connected with the sealing member 30, it is used for delivering high temperature protective gas and spraying powder into the bell 10;

[0102] Among them, the rotating part 20 includes a drive motor and a gear plate. The power output shaft of the drive motor is provided with a protrusion, and the gear plate is provided with a groove that matches the protrusion. After the drive motor is started, the power output shaft rotates to drive the gear. When the disk rotates, the gear disk i...

Embodiment 2

[0110] This embodiment provides a spraying device for the inner wall of a bell jar of a reduction furnace. In addition to the nickel matrix layer provided on the inner wall of the bell jar 10, the outer surface of the bell jar 10 and the outer surface of the sealing member 30 are respectively provided with a thermal insulation layer ( figure 1 not shown), and the rest of the components and structures are the same as those in Embodiment 1.

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Abstract

The invention provides a reduction furnace bell jar inner wall spraying device and spraying method and a reduction furnace, and relates to the technical field of polycrystalline silicon equipment. Thespraying device comprises a bell jar, a rotating part, a sealing part, a vacuumizing part, an exhaust part and a cold gas power spraying part; and after a closed space is formed in the bell jar through a sealing part, the interior of the bell jar is in a high-temperature protective gas atmosphere through the vacuumizing part, the cold gas power spraying part and the exhaust part, then the cold gas power spraying part is adopted to spray powder to the inner wall of the bell jar to form a coating on the inner wall of the bell jar, the interior of the bell jar is in the high-temperature protective gas atmosphere before spraying, oxidation of the coating in the spraying process can be avoided, and the intrinsic performance of a coating material can be reserved to the maximum extent; and meanwhile, the inner wall of the bell jar is preheated by using high-temperature protective gas, so that the coating with high bonding strength is obtained under a relatively low spraying condition. The invention further provides the reduction furnace bell jar inner wall spraying method.

Description

technical field [0001] The invention belongs to the technical field of polysilicon equipment, and in particular relates to a spraying device for the inner wall of a bell jar of a reduction furnace, a spraying method and a reduction furnace. Background technique [0002] Polysilicon is the basic material in the microelectronics industry and photovoltaic industry, and the modified Siemens method is the mainstream method for preparing polysilicon at present. The characteristics of the improved Siemens method are: in the bell-jar chemical vapor deposition (CVD) reactor (in the industry term, polysilicon reduction furnace), a fine silicon core heated to a temperature of 950-1150 ℃ by electrification is used as the deposition carrier. The trichlorosilane and hydrogen in the polysilicon reduction furnace undergo a hydrogen reduction reaction on the surface of the hot silicon core, and the reduced silicon is deposited on the surface of the silicon core. As the hydrogen reduction rea...

Claims

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Application Information

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IPC IPC(8): B05B13/06B05D1/12B05D3/04B05D7/22
CPCB05B13/069B05D1/12B05D3/0473B05D7/227
Inventor 张宝顺王体虎宗冰
Owner ASIA SILICON QINGHAI
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