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A rotary drum reactor for pulse chemical vapor deposition coating and its application

A chemical vapor deposition and reactor technology, applied in the field of reactors, can solve the problems of slow reaction, uneven thickness, and accelerated gas phase coating reaction rate, etc., and achieve the effects of simple operation, easy processing and manufacturing, and improved gas conductivity

Active Publication Date: 2021-08-17
SICHUAN UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] In view of the above problems, the present invention provides a drum reactor for pulse chemical vapor deposition coating, the reactor in the present invention is conducive to scale-up and industrial application, can improve gas-solid phase contact conditions, and solve the problem caused by gas diffusion The problem of slow reaction caused by it can speed up the gas phase coating reaction rate, and can simplify the operating conditions, avoiding the influence of uneven thickness, raw material loss, dust pollution, etc. in the process of laying raw materials

Method used

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  • A rotary drum reactor for pulse chemical vapor deposition coating and its application
  • A rotary drum reactor for pulse chemical vapor deposition coating and its application
  • A rotary drum reactor for pulse chemical vapor deposition coating and its application

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Embodiment Construction

[0034] The specific embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings.

[0035] In the embodiment of the present invention, such as Figure 1~3 As shown, a rotary drum reactor for pulse chemical vapor deposition coating is provided. The rotary drum reactor in the present invention includes a precursor supply part A, a reaction part B and an exhaust gas treatment part C. Such as figure 1 As shown, the precursor supply part A includes the supply of SiCl 4 The first air supply part and the second air supply part supply water vapor; wherein, the second air supply part is a pipe with two ends open, which is used to fill the reaction drum 6 with air with moisture; the first air supply part The gas part includes a source bottle 2, the source bottle 2 is made of stainless steel, etc., and a precursor such as SiCl is arranged inside it. 4and other cavities, the top is provided with a detachable flange cover with a pr...

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Abstract

The invention discloses a drum type reactor for pulse chemical vapor deposition coating and application thereof. The reactor includes a precursor supply part, a reaction part, and an exhaust gas treatment part; the precursor supply part includes a first gas supply part and a second gas supply part, and the first gas supply part includes a source bottle with a heating device; the second gas supply part It is connected to the air and sucked in by the negative pressure of the reaction part; the reaction part includes the reaction drum and the driving device for driving the reaction drum, and the reaction drum is placed horizontally on the driving device; the tail gas treatment part is used for vacuuming the reaction drum and absorbing reaction after the exhaust. Reactor among the present invention is mainly used for anatase TiO 2 For pulse chemical vapor deposition coating, the reactor with this structure can improve the gas-solid phase contact conditions, solve the problem of slow reaction caused by difficult gas diffusion, speed up the reaction rate of gas phase coating, and simplify the operating conditions, avoiding the Uneven thickness, raw material loss, dust pollution and other effects in the tiling process.

Description

technical field [0001] The invention belongs to the technical field of reactors, and in particular relates to a rotary drum reactor for pulse chemical vapor deposition coating and its application. Background technique [0002] TiO 2 As a white pigment, it has important applications in the fields of coatings, plastics and papermaking, but TiO 2 The photocatalytic performance will promote the oxidative decomposition of organic matter, causing the paint to fade, surface roughness and powdering. in TiO 2 Depositing an inert film layer on the surface of the particles can inhibit its photocatalytic performance and maintain its excellent pigment performance. [0003] in TiO 2 In the field of coating, there are liquid-phase synthesis method and gas-phase synthesis method, and the liquid-phase synthesis method has achieved industrial application. However, the liquid phase synthesis method is difficult to precisely control the film layer, and the film layer is porous, and it need...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C16/455C23C16/40
CPCC23C16/402C23C16/4417C23C16/45544
Inventor 钟山杨柯梁斌岳海荣唐思扬马奎刘长军
Owner SICHUAN UNIV
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