A Design Method of Delay Line-Based Surface Acoustic Wave Sensing Circuit System
A technology of delay line type and sensing circuit, which is applied to the analysis of fluids using sound waves/ultrasonic waves/infrasonic waves, material analysis using sound waves/ultrasonic waves/infrasonic waves, and electrical components, etc., which can solve national economic and national property losses and system stability. Low power consumption, false positives of the sensor system, etc., to achieve low power consumption, increase stability and reliability, and filter out interference
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[0070] like Figure 1 to Figure 7 The shown method for designing a delay line-based surface acoustic wave sensing circuit system includes the following steps:
[0071] Step 1. Fabrication of a delay line type surface acoustic wave device without sensitive film:
[0072] Step 101: Select the piezoelectric thin film layer 1, and set the input interdigital transducer 2 and the output interdigital transducer 3 on the piezoelectric thin film layer 1, the input interdigital transducer 2 and the output interdigital transducer The structure of the device 3 is the same, and the input interdigital transducer 2 and the output interdigital transducer 3 are symmetrically arranged with respect to the center of the piezoelectric film layer 1, and both ends of the piezoelectric film layer 1 are coated with sound-absorbing glue 5;
[0073] Step 102 , encapsulate the delay line type surface acoustic wave device obtained in step 101 by using wire bonding equipment to obtain a delay line type s...
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