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Sintered neodymium iron boron magnet surface functional film and preparation method thereof

A functional film, NdFeB technology, applied in permanent magnet manufacturing, inductor/transformer/magnet manufacturing, coating, etc., can solve the problems of poor corrosion resistance, improve high temperature resistance and oxidation resistance, good hardness and resistance The effect of corrosion protection performance

Inactive Publication Date: 2020-05-08
SHENYANG GENERAL MAGNETIC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] Aiming at the problem of poor corrosion resistance of a single TiN layer on the surface of a sintered NdFeB magnet, the present invention provides a high corrosion resistance composite film layer on the surface of a sintered NdFeB magnet and a preparation method thereof

Method used

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  • Sintered neodymium iron boron magnet surface functional film and preparation method thereof
  • Sintered neodymium iron boron magnet surface functional film and preparation method thereof

Examples

Experimental program
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Effect test

Embodiment 1

[0027] Fill the vacuum chamber with argon gas to a pressure of 0.5Pa, and the radio frequency power is 115W, and deposit an aluminum oxide film layer on the magnet body by radio frequency sputtering; finally, discharge the gas in the vacuum chamber, according to the argon gas flow rate of 30 sccm and nitrogen gas flow rate of 2 sccm Fill the vacuum chamber with argon and nitrogen until the pressure in the vacuum chamber is 0.35Pa, adjust the power of the titanium target to 115W, deposit a titanium nitride film on the aluminum oxide film of the magnet body, turn off the power supply of the titanium target after completion, and the aluminum oxide and The thickness ratio of titanium nitride is 3:22. At this time, one cycle of deposition is completed, and four cycles are deposited according to the above steps. After testing, the performance of the composite film layer obtained under this condition is as follows:

[0028]

Embodiment 2

[0030] Fill the vacuum chamber with argon gas to a pressure of 0.5Pa, and the radio frequency power is 115W, and deposit an aluminum oxide film layer on the magnet body by radio frequency sputtering; finally, the gas in the vacuum chamber is exhausted, and the flow rate of the argon gas is 30 sccm and the nitrogen gas flow rate is 2 sccm. Fill the vacuum chamber with argon and nitrogen until the pressure in the vacuum chamber is 0.35Pa, adjust the power of the titanium target to 115W, deposit a titanium nitride film on the aluminum oxide film of the magnet body, turn off the power supply of the titanium target after completion, and the aluminum oxide and The thickness ratio of titanium nitride is 3:22. At this time, one cycle of deposition is completed, and 20 cycles are deposited according to the above steps. After testing, the performance of the composite film layer obtained under this condition is as follows:

[0031]

[0032] In an optional embodiment, the following ste...

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Abstract

The invention discloses a sintered neodymium iron boron magnet surface functional film and a preparation method thereof. The method comprises the steps including using of a magnet pretreatment process, magnet deposition pretreatment and preparation of the functional film by adopting a physical vapor deposition method. The functional film is a multiperiodic composite film with an Al2O3 layer and aTiN layer serving as one period, and meanwhile, the functional film has the hardness above 15 GPa and good corrosion protection performance and oxidation resistance. At the same time, by depositing the Al2O3 layer and the TiN layer alternately, microstructure defects such as pin-holes, through holes and micro-cracks penetrating a single-layer film are prevented from being formed, and the defect that the thickness of the traditional single-layer film is hard to control is well solved; and moreover, the high temperature oxidation resistance of a magnet is enhanced by adding Al2O3. By adopting the form of combined double-layer film alternating deposition and multiple periods, internal stress of the film is reduced, and the film based adhesive force is enhanced. By depositing the functional film on a neodymium iron boron surface, the application fields of neodymium iron boron in high humidity and heat environments and acid and alkali environments are expanded.

Description

technical field [0001] The invention belongs to the field of surface protection of permanent magnet devices, in particular to a functional film layer on the surface of a sintered NdFeB magnet and a preparation method thereof. Background technique [0002] As a magnet with high saturation magnetization, strong coercive force and high cost performance, NdFeB magnets are widely used in high-tech industries such as new energy vehicle manufacturing, wind power generation, and new motors. However, due to the characteristics of NdFeB itself, it is easy to Corrosion occurs. [0003] At present, electroplating is often used in the industry to form a protective film on the surface of NdFeB, but it is prone to secondary corrosion. At this stage, the use of physical phase deposition method to deposit functional thin films on sintered NdFeB magnets has become a hot spot, and single titanium nitride thin films generally have structural defects such as pinholes and microcracks. The path ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/35C23C14/08C23C14/06H01F41/02
CPCC23C14/0036C23C14/0641C23C14/081C23C14/35H01F41/026
Inventor 段永利邓文宇齐丽君孙宝玉
Owner SHENYANG GENERAL MAGNETIC
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