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Flexible label-free nano bulge metasurface structure and manufacturing and sensing methods thereof

A metasurface, label-free technology, applied in the field of biomedical detection, which can solve the problems of expensive patterning and time-consuming

Inactive Publication Date: 2020-02-25
XIAMEN UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] The embodiment of the present invention provides a method aimed at solving the problem of time-consuming and expensive fabrication of plasmonic metasurface biosensors using nanostructures in the prior art on rigid substrates such as silicon, glass, or fused silica. Patterning, a problem that limits its application

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  • Flexible label-free nano bulge metasurface structure and manufacturing and sensing methods thereof
  • Flexible label-free nano bulge metasurface structure and manufacturing and sensing methods thereof
  • Flexible label-free nano bulge metasurface structure and manufacturing and sensing methods thereof

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Embodiment 1

[0035] see figure 1 , the embodiment of the present invention provides a flexible label-free nano-protrusion metasurface structure (hereinafter referred to as the metasurface structure). The flexible label-free nano-protrusion metasurface structure includes: a metasurface structure chip (not marked), a biological reagent (not labeled) and integrated fiber optic probe (7).

[0036] In the embodiment of the present invention, the above-mentioned metasurface structure chip is composed of substrate (1), chromium film and gold film (2) sequentially from bottom to top, wherein, the substrate (1) is covered with nickel mold stamped Periodic array of nanopillars.

[0037] As a preferred embodiment of the present invention, the thickness of the chromium film in the chromium film and the gold film (2) is 5 nm, and the thickness of the gold film is 150 nm.

[0038] As another preferred embodiment of the present invention, the above-mentioned periodic nanopillar array has a diameter of ...

Embodiment 2

[0044] The embodiment of the present invention also provides a method for fabricating a flexible label-free nano-protrusion metasurface structure, comprising the following steps:

[0045]The first step: nanoimprinting, under the pressure of 40bar, within the temperature range of 110°C to 150°C, the substrate (1) is heat-treated with a 2-inch nickel mold to form a periodic nanopillar array.

[0046] The second step: plasma etching, setting different etching times, etching the periodic nano-column array in the nano-imprinting step with oxygen plasma, and etching the nano-column array into a nano-protrusion substrate.

[0047] As a preferred embodiment of the present invention, the optimal etching time in the above-mentioned plasma etching step is 425s, it can be seen that the diameter and shape of the nano-column array of the surface structure will change at this time (see specifically image 3 ), which can reduce the reflectivity at the optimal etching time, and also show chara...

Embodiment 3

[0053] The embodiment of the present invention also provides a sensing method for a flexible label-free nano-protrusion metasurface structure, comprising the following steps:

[0054] Step 1: Prepare a 10 mmol / L MUA ethanol solution, and store the supersurface structure in the MUA ethanol solution for 8 to 14 hours to form a MUA self-assembled film.

[0055] As a preferred embodiment of the present invention, the above storage time is 12 hours.

[0056] Step 2: Prepare the EDC solution of 400mmol / L and the NHS solution of 100mmol / L, first clean the metasurface structure in the above step 1 with deionized water, then use the EDC solution of 400mmol / L and the NHS solution of 100mmol / L to dissolve the supersurface structure Surface structures were soaked for 0.5 h to activate MUA (3).

[0057] Step 3: soak the metasurface structure in the above step 2 in 40ug / mL CEA antibody solution for 0.5 to 1.5 hours, so that the CEA antibody in the CEA antibody solution binds to the MUA (3)...

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Abstract

The invention belongs to the technical field of biomedical detection, and provides a flexible label-free nano bulge metasurface structure. The flexible label-free nano bulge metasurface structure comprises a metasurface structure chip, a biological reagent and an integrated optical fiber probe; the metasurface structure chip is sequentially composited by a substrate, a chromium film and a gold film from bottom to top, wherein the substrate is covered with a periodic nanocolumn array imprinted by a nickel die; the biological reagent comprises a 11-mercaptoundecanoic acid (MUA) solution, a phosphate buffer solution (PBS), ethyl-dimethyl-amino-propyl carbodiimide (EDC), N-hydroxysuccinimide (NHS), bovine serum albumin (BSA), a carcino-embryonic antigen (CEA) and a carcino-embryonic protein antibody (Anti-CEA); and the integrated optical fiber probe is used for measuring a reflection spectrum of the metasurface structure. The invention further provides manufacturing and sensing methods ofthe flexible label-free nano bulge metasurface structure. The metasurface structure provided by the invention is low in cost, and the biomedical function of the metasurface structure is applied to high-performance biosensors.

Description

technical field [0001] The invention belongs to the technical field of biomedical detection, and in particular relates to a flexible label-free nano-protrusion supersurface structure and a manufacturing and sensing method thereof. Background technique [0002] In recent years, research on plasmonic metasurfaces has attracted intense attention due to the increasing demand for applications in optical lenses, sensing, light trapping, integrated circuits, high-resolution imaging, and chemical analysis. Metasurface label-free biomolecular sensing technology has achieved significant results. Therefore, efforts have been made to improve the performance of plasmonic sensors, driven by the growing demand for fast, highly sensitive, and low-cost point-of-care biosensors and mobile medical biosensors. [0003] Plasmonic metasurface biosensors usually adopt uniform periodic nanostructures and are processed through low-cost and reproducible processes, which have the advantages of fewer ...

Claims

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Application Information

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IPC IPC(8): G01N21/552B82Y5/00B82Y30/00
CPCB82Y5/00B82Y30/00G01N21/554
Inventor 朱锦锋李法君刘雪莹邱锦林申家情熊健凯
Owner XIAMEN UNIV
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