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Infrared detector of micro electro mechanical system and manufacturing method thereof

A technology of infrared detectors and micro-electromechanical systems, applied in electric radiation detectors, components of TV systems, radiation pyrometry, etc., can solve the problems of different absorption rates, picture distortion, infrared detection rate and response rate need to be improved, etc. problem, to achieve the effect of enhancing the electromagnetic field concentration, super high absorption, and excellent infrared absorption performance

Pending Publication Date: 2020-02-14
NANTONG UNIVERSITY
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, key performances such as its infrared detection rate and response rate still need to be improved.
In addition, the existing MEMS infrared detectors have different absorption rates for different frequencies of light, which may easily cause image distortion under specific environmental requirements

Method used

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  • Infrared detector of micro electro mechanical system and manufacturing method thereof
  • Infrared detector of micro electro mechanical system and manufacturing method thereof
  • Infrared detector of micro electro mechanical system and manufacturing method thereof

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Embodiment Construction

[0032] The technical solutions in the embodiments of the invention will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of the invention. Obviously, the described embodiments are only some, not all, embodiments of the invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts fall within the protection scope of the present invention.

[0033] The present application provides a MEMS infrared detector structure, including an interdigital electrode structure 1 for inputting and outputting frequency signals and disposing at least two electrodes 4; Structure 2; and a plasmonic metasurface structure 3 that is used to achieve ultra-high absorption of infrared radiation and is located on the upper layer of the piezoelectric vibration structure 2;

[0034] In this application, the interdigitated electrode structure 1 materi...

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Abstract

The invention provides a structure of an infrared detector. The structure comprises an interdigital electrode structure which is used for inputting and outputting frequency signals and is provided with at least two electrodes; a piezoelectric vibration structure used for generating a frequency signal and positioned on the upper layer of the interdigital electrode structure; and a plasma metasurface structure used for realizing ultrahigh absorption of infrared radiation and positioned on the upper layer of the piezoelectric vibration structure. A plasma metasurface structure made of a gold filmis adopted so that a series of sub-wavelength structures are patterned in a top metal electrode. The plasma nanostructure is properly patterned in the top metal layer, so that the invention becomes an infrared ultrathin absorber with spectral selectivity and irrelevance to polarization, ultrahigh absorption of long-wave infrared light can be realized, high-speed and high-sensitivity infrared detection can be realized, and the defects existing in a traditional infrared detector are avoided. On the basis, the invention further provides a manufacturing method of the infrared detector of the microelectro mechanical system.

Description

technical field [0001] The invention relates to an infrared detector and a manufacturing method thereof, and specifically designs a plasma piezoelectric resonance microelectromechanical system infrared detector and a manufacturing method thereof, belonging to the technical field of microelectromechanical system infrared detectors. Background technique [0002] Due to the advantages of strong environmental adaptability, good concealment, strong recognition ability, small size, light weight, low power consumption, and wide spectral response range, infrared detection technology is widely used in non-contact temperature measurement, medical detection, night vision and other fields. There are applications. Among various types of infrared detectors, uncooled thermal detectors are favored by people because they can work at room temperature without requiring bulky and expensive refrigeration equipment. Thermal detectors can be roughly divided into thermistor infrared detectors, the...

Claims

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Application Information

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IPC IPC(8): B81B7/02B81C1/00G01J5/20
CPCG01J5/20B81B7/02B81C1/00317G01J2005/206B81B2201/0292
Inventor 赵继聪诸政孙海燕宋晨光孙玲
Owner NANTONG UNIVERSITY
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