Display substrate, manufacturing method thereof and display device

Abstract

The invention provides a display substrate, a manufacturing method thereof and a display device, which relate to the technical field of display and solve the problem that when a flat layer is etched at the same time to form a via hole exposing an output electrode and a via hole exposing a compensation cathode pattern, the output electrode is easily over-etched, and subsequent poor lap joint with an anode is caused. The manufacturing method comprises steps: a photoresist layer is exposed, the orthographic projection of a formed photoresist half-reserved area on the substrate is located in the orthographic projection of an output electrode on the substrate, and the orthographic projection of a photoresist complete removal area on the substrate is located in the orthographic projection of a compensation cathode pattern on the substrate; and the photoresist located in the photoresist half-reserved area, a flat layer corresponding to the photoresist half-reserved area and the flat layer corresponding to the photoresist complete removal area are etched, and a first via hole exposing the surface, back to the substrate, of the output electrode and a second via hole exposing the surface, back to the substrate, of the compensation cathode pattern are formed at the same time. The manufacturing method provided by the invention is used for manufacturing the display substrate.

Description

technical field [0001] The invention relates to the field of display technology, in particular to a display substrate, a manufacturing method thereof, and a display device. Background technique [0002] When making a large-sized organic light-emitting diode (English: Organic Light-Emitting Diode, referred to as OLED) display substrate, generally a compensation cathode pattern is provided in the display substrate, and the compensation cathode pattern is coupled to the cathode in the OLED display substrate , to reduce the resistance of the cathode. The display substrate also includes a transistor for outputting a driving signal, and a light-shielding layer and a conductive functional pattern are generally arranged directly under the output electrode of the transistor, so that in a direction perpendicular to the base of the display substrate, the output electrode faces away from the base The height of the surface is higher than the height of the surface of the compensation cat...

AI Technical Summary

Problems solved by technology

[0005] The purpose of the present invention is to provide a display substrate and its manufacturing method, and a display device, which are used to solve the problem of simultaneously etching the flat layer to form via holes for exposing the output electrodes and exposing the compensation under the same etching conditions. When the via hole of the cathode pattern is used, the output electrode is easily over-etched, resulting in poor subsequent lap connection with the anode, which affects the product yield.

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