Three-dimensional packaging structure and method for bonding wall fan-out device
A three-dimensional packaging and wall structure technology, applied in the direction of electric solid devices, semiconductor devices, assembling microstructure devices, etc., can solve the problems of small chip area, difficult to meet product requirements, too many I/Os, etc. Device area, ease of processing, effect of increasing device count
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[0043] The present invention will be further described below through specific embodiments.
[0044] refer to figure 1 , a three-dimensional packaging structure for bonded wall fan-out devices, including a device 10, an encapsulation material 20, a wall structure 30, a cover plate 40, a metal interconnection structure, and the like. The first surface of the device 10 is provided with pads 11 and functional areas 12 . The functional area 12 is provided with an IDT, and the pad 11 can be an aluminum pad, an AlNiAu pad, an AlNiPdAu pad, and the like. The chip type of the device of the present invention is a SAW filter, a BAW filter or other filter devices with similar functions, and the device 10 is a device 10 after dicing wafer materials such as lithium niobate, lithium tantalate, glass, and silicon.
[0045] The encapsulation material 20 encapsulates the device 10 except the first surface, see figure 1 , the encapsulation material 20 encapsulates four sides and one bottom ed...
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