Automatic detecting and positioning device and method of laser spot focus

Abstract

The invention provides an automatic detecting and positioning device of a laser spot focus. A photoelectric detector (4) of the device detects a laser spot focused by a focusing lens (13) from a spotincidence hole of a spot detecting face (5) to obtain signals, the signals are sent by a signal sending line (3) to a central processing unit (1) connected with the signal sending line, and the central processing unit (1) sends a movement instruction to an X-directional, Y-directional and Z-directional stepping motor connected with the central processing unit (1) through a signal receiving line (3) according to spot signal data changes until the spot detecting face (5) moves to the laser focus. By means of the automatic detecting and positioning device, feedback adjustment is conducted on theposition of the spot detecting face through a horizontal movement table control module, the automatic search of the position of the laser focus is realized, the precise setting of a to-be-detected sample can be realized, and the scanning and imaging of a tiny spot can be realized through a filtering image reconstruction module. The automatic detecting and positioning device is suitable for a supervacuum closed space and has the remarkable advantages of being easy to operate, flexible in measurement method, simple in system framework, low in construction cost and the like.

Description

technical field [0001] The invention generally belongs to the technical field of high-ultra-vacuum laser diagnosis and characterization, and in particular relates to an automatic positioning and detection device for laser spot focus, and provides a method for moving a sample to the focus point. Background technique [0002] Laser is the light generated by the stimulated radiation of atoms, and the excited photon beam has highly consistent optical properties. This makes the laser have the advantages of good monochromaticity, high brightness and good directionality compared with ordinary light sources. Lasers are widely used, such as laser marking, laser welding, laser cutting, etc. In actual application, the laser focal length of the focusing system will be slightly different due to different focusing lenses and optical systems. How to quickly and accurately obtain the laser focal length of the focusing system has become a difficult problem in the laser application process....

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Problems solved by technology

[0004] In the prior art, as disclosed in Japanese Patent Document No. 6-7980 and Chinese Patent Document CN 102974936, the determination of the position of the focal point depends on the detection of the plasma light by the photoelectric sensor, but the specific size of the focal point cannot be detected at the same time.

[0005] In the deep ultraviolet electromagnetic wave band, laser transmission is greatly affected by water vapor absorption and attenuation, and the adjustment and construction of the optical path must be carried out under vacuum conditions, so plasma light cannot be generated due to gas ionization. In addition, conventional CCD cameras basically cannot respond to deep ultraviolet band laser, only photodetectors made of gallium nitride (GaN) or aluminum gallium nitride (AlGaN) materials in the market can respond well to electromagnetic waves in the 100 to 300nm band

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