Composite-structure dual-absorption layer graphene detector and fabrication process thereof

Abstract

The invention discloses a composite-structure dual-absorption layer graphene detector and a fabrication process thereof. The detector comprises a silicon dioxide substrate, a graphene nanobelt, a metal electrode, a nanometer grating antenna, a metal quantum dot, a metal film annular belt and a transparent adhesive. A sub-wavelength nanometer grating antenna is used for coupling and conducting a light beam and simultaneously generating plasma resonance so as to improve receiving efficiency and improving photoelectric response, the metal quantum dot is used for simulating surface plasmon polariton and generating surface plasmon resonance to improve photoelectric response, and the metal film annular belt is used for focusing an incident light beam so that incident light energy acts on a detection region in a concentrated way and the photoelectric response is improved. With a front-surface and back-surface detector structure, the front surface and the back surface are used for simultaneously receiving and converting to photocurrents, the receiving area is effectively expanded, and the photoelectric response is further improved; and the corresponding fabrication process is simple to operate and is high in reliability. By the detector, the technical bottleneck of graphene weak photon energy detection is favorably broken through.

Description

Technical field [0001] The invention belongs to the technical fields of material science, optoelectronic devices and micro-nano manufacturing, and specifically relates to a composite structure double absorption layer graphene detector and a preparation process thereof. Background technique [0002] Photodetectors can convert weak radiation signals that are difficult to observe by the human eye into other measurable physical quantities. They have great application requirements in the fields of military reconnaissance, early warning and guidance, civilian medical image processing, and security detection. Photodetectors based on traditional materials such as lead selenide (PbSe), lead telluride (PbTe), mercury cadmium telluride (HgCdTe), indium gallium arsenide (InGaAs) and other traditional materials have large volume and power consumption, difficult material preparation, high detection cost and usually The need for refrigeration has greatly restricted its application range. Graph...

AI Technical Summary

Problems solved by technology

However, although the electron mobility of graphene is high, its normalized detection responsivity is usually very low due to the extremely low light absorption rate of monolayer atoms.

Images