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A graphene-based waveguide integrated multi-mode electro-optic modulator and manufacturing method

An electro-optic modulator and waveguide integration technology, applied in the field of integrated optics, can solve the problems that affect the application of mode division multiplexing technology, are not conducive to the high integration and temperature control of on-chip devices, increase equipment cost and volume, etc., to facilitate high-density integration. , the effect of large carrier mobility, low energy consumption and heat

Active Publication Date: 2020-09-01
TIANJIN UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

It is impossible to modulate different modes in the same device at the same time, which increases the cost and volume of the device to a certain extent, which is not conducive to the high integration and temperature control of on-chip devices
[0005] In summary, although the mode division multiplexing technology has been developed rapidly in recent years, each mode requires separate modulation, which affects the application of the mode division multiplexing technology in integrated optics.

Method used

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  • A graphene-based waveguide integrated multi-mode electro-optic modulator and manufacturing method
  • A graphene-based waveguide integrated multi-mode electro-optic modulator and manufacturing method
  • A graphene-based waveguide integrated multi-mode electro-optic modulator and manufacturing method

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Embodiment 1

[0030] Such as figure 2 The graphene-based waveguide-integrated multimode electro-optic modulator shown: the graphene width of the first graphene nanoribbon layer 1 is 300 nm, the graphene width of the second graphene nanoribbon layer 2 is 350 nm, and the waveguide width is 1 μm, and the height of the multimode ridge waveguide 4 is 250 nm. The graphene-based waveguide-integrated multimode electro-optic modulator is designed as a Mach-Zehnder modulator with two arms of 350 nm in length. In the initial state, by adjusting the voltage of the first electrode pair 5 and the second electrode pair 6, the third electrode 7 provides a back gate voltage, so that the Fermi of the first graphene nanoribbon layer and the second graphene nanoribbon layer of the two arms The energy levels are all tuned to 0.4 eV. Such as Figure 3-1 with Figure 3-2 As shown, by adjusting the voltage of the first electrode pair to change the Fermi level of the first graphene nanoribbon layer to 0.8 eV to...

Embodiment 2

[0033] Such as Figure 4 The graphene-based waveguide-integrated multimode electro-optic modulator shown: the graphene width of the first graphene nanoribbon layer 1 is 300 nm, the graphene width of the second graphene nanoribbon layer 2 is 350 nm, and the waveguide width is 1 μm, the height of the multimode ridge waveguide 4 is 250 nm, and the graphene-based waveguide-integrated multimode modulator is designed as a micro-track resonant cavity modulator, which is a kind of micro-ring resonant cavity , the length of the straight waveguide in the micro-track resonator is 228.5 μm, the radius of the semicircle in the micro-track resonator is 30 μm, and the distance between the straight waveguide and the coupled straight waveguide 10 of the micro-track resonator is 344nm. Select 1.55237 μm as the detection wavelength. Such as Figure 5-1 to Figure 5-4 As shown, in the initial state, by adjusting the voltages of the first electrode pair 5 and the second electrode pair 6, and maki...

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Abstract

The invention discloses a graphene-based waveguide integrated multimode electro-optic modulator and a manufacturing method thereof. The modulator comprises a first graphene nanoribbon layer, a secondgraphene nanoribbon layer, an insulator cladding, a multimode ridge waveguide, a first electrode pair, a second electrode pair, a third electrode pair, an insulating layer and a substrate layer, wherein the multimode ridge waveguide supports two transverse electric modes (TE), that is, a TE0 mode and a TE1 mode are simultaneously transmitted; the first graphene nanoribbon layer and the second graphene nanoribbon layer are integrated above the multimode ridge waveguide; the insulator cladding is used to achieve electrical isolation of the multimode ridge waveguide from the first graphene nanoribbon layer and the second graphene nanoribbon layer; the first electrode pair is connected to the first graphene nanoribbon layer, the second electrode pair is connected to the second graphene nanoribbon layer, and the third electrode pair is coupled to the multimode ridge waveguide for providing a back gate voltage to the graphene.

Description

technical field [0001] The invention relates to the technical field of integrated optics, in particular to a graphene-based waveguide integrated multi-mode electro-optic modulator and a manufacturing method. Background technique [0002] Graphene-silicon-based hybrid integrated optical circuits have attracted great attention in the past few years. Due to graphene's ultra-high carrier mobility and tunable Fermi level, the absorption of light by graphene can be quickly adjusted through the energy band filling effect, which can be used to develop high-speed optoelectronic integrated devices. Furthermore, by combining graphene with silicon waveguides, light propagating in silicon waveguides can interact with the surface-integrated graphene through the evanescent field. This structure takes full advantage of the unique physical properties of single-atom-layer graphene without being affected by the weaker light-matter interactions in atomic-layer-thick graphene. So far, based on...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02B6/12G02B6/13
CPCG02B6/12G02B6/13G02B2006/12035G02B2006/12085G02B2006/1209G02B2006/12142G02B2006/12166
Inventor 程振洲邢正锟韩迎东胡浩丰刘铁根
Owner TIANJIN UNIV
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