Fast and reliable combustion-supporting circuit of direct current magnetron sputtering coating power supply

Abstract

The invention belongs to the technical field of automatic control and power electronics, and particularly relates to a fast and reliable combustion-supporting circuit of a direct current magnetron sputtering coating power supply. By adding a combustion-supporting circuit, the voltage output by the combustion-supporting circuit is superposed with the voltage output by a high-frequency rectifier bridge of a high-frequency inverter switching power supply to reach the amplitude of the combustion-supporting starting voltage; when the starting is successful, the output current of the direct currentmagnetron sputtering power supply exceeds a starting success determination threshold value, or the output voltage of the direct current magnetron sputtering power supply is lower than a no-load voltage determination threshold value of a main power supply, the combustion-supporting circuit stops working, and the voltage and the current required by the direct current magnetron sputtering process aresupplied by the main circuit of the direct current magnetron sputtering coating power supply; once the glow is extinguished, the combustion-supporting circuit is started to output, and the output voltage of the power supply reaches the amplitude of the combustion-supporting starting voltage, so that the continuity of the coating process is ensured; and the arc energy is reduced, and the coating quality is improved.

Description

Technical field [0001] The invention belongs to the fields of automatic control technology and power electronics technology, and specifically relates to a fast and reliable combustion-supporting circuit of a DC magnetron sputtering coating power supply. Background technique [0002] DC magnetron urban injection is an important physical vapor deposition technology, which is widely used in industrial production and scientific research. DC magnetron sputtering has the advantages of high deposition rate and low substrate temperature. The film obtained by sputtering has high purity, good compactness and good combination with the substrate, the sputtering process has good repeatability, and the film thickness is controllable. At the same time, a film with uniform thickness can be obtained on a large area substrate. [0003] In the DC magnetron sputtering coating process, the operating state of the power supply is divided into two stages: combustion-supporting start and sputtering coatin...

AI Technical Summary

Problems solved by technology

Therefore, it brings unfavorable factors to the design of the main circuit of the high-frequency inverter switching power supply: the output voltage of the high-frequency step-up transformer is high, and there is an insulation voltage problem; each bridge arm of the high-frequency rectifier bridge uses multiple fast recovery diodes in series to solve the problem The more the number of diodes in series, the more difficult it is to solve the problem of voltage equalization in series; when the DC magnetron sputtering power supply outputs the same voltage and current, the ratio of the number of turns between the secondary side of the boost transformer and the primary side winding is greater , the larger the pulse current of the primary side, the inverter full bridge will use a switch tube with a higher rated current level; especially in the application field of DC voltage with particularly high requirements for combustion-supporting ignition, these problems will lead to an increase in the material cost of the power supply, reliability, Reduced safety and stability, further affecting the stability of the coating process

[0005] The DC magnetron sputtering coating target is easy to poison and pull the arc. After the target is poisoned, a higher combustion-supporting ignition voltage is required. In addition, the atmosphere change in the coating process requires a higher combustion-supporting ignition voltage after extinction, which is difficult for combustion-supporting ignition. For the application field of coating process that requires high ignition voltage, the continuity of the coating process will be affected if the target is in the state of unable to start and discharge normally for a long time or frequently.

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