Powder body dehydroxylation treatment method and preparation method of quartz glass

A processing method and technology of quartz glass, applied in the field of manufacturing process, can solve the problems of reducing the spectral transmittance of quartz glass in the vacuum ultraviolet band, affecting the application quality of quartz glass, increasing Si-Cl bonds, etc., so as to ensure the spectral transmittance, Low hydroxyl content, the effect of reducing hydroxyl content

Active Publication Date: 2019-07-23
ZHONGTIAN TECH
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Problems solved by technology

The existing technology mostly uses chlorine-containing gas as the dehydration gas. However, while reducing the hydroxyl content, it will lead to an increase in the number of Si-Cl bonds. The spectral transmittance will ultimately affect the application quality of quartz glass in high-end technical fields, such as in the field of semiconductor integrated circuit lithography, etc.

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  • Powder body dehydroxylation treatment method and preparation method of quartz glass
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  • Powder body dehydroxylation treatment method and preparation method of quartz glass

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[0031] In order to more clearly understand the above objects, features and advantages of the embodiments of the present invention, the present invention will be described in detail below in conjunction with the accompanying drawings and specific embodiments. It should be noted that, in the case of no conflict, the features in the embodiments of the present application may be combined with each other.

[0032] In the following description, many specific details are set forth in order to fully understand the embodiments of the present invention, and the described implementations are only part of the implementations of the present invention, but not all of them. Based on the implementation manners in the present invention, all other implementation manners obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the embodiments of the present invention.

[0033] Unless defined otherwise, all technical and scientific terms u...

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Abstract

The invention provides a powder body dehydroxylation treatment method and a preparation method of quartz glass. Dehydroxylation atmosphere replaces existing chlorine-containing gas, the content of hydroxyl is effectively reduced, and the spectrum transmittance of the infrared band is guaranteed; the defect that the transmittance is affected by the fact that absorption peaks are produced at the vacuum ultraviolet band because of generation of Si-Cl bonds is overcome. With the adoption of the method, the prepared quartz glass has low content of hydroxyl, meanwhile, no other spectrum absorption groups or chemical bonds are produced, and the application quality of an advanced technology is guaranteed.

Description

technical field [0001] The invention relates to the technical field of manufacturing process, in particular to a powder dehydration treatment method and a preparation method of quartz glass. Background technique [0002] The preparation process of quartz glass is generally divided into direct method and indirect method. The indirect method has the advantages of low deposition temperature, high deposition rate, low energy consumption and low production cost, and is currently the preferred process for preparing quartz glass. During the indirect preparation process, due to the hydrolysis of the hydrogen-oxygen flame, a large amount of hydroxyl groups will be introduced into the quartz glass. The hydroxyl group will cause a strong absorption peak in the infrared band (about 2730nm wavelength), which will seriously affect the spectral transmittance in the infrared band. Therefore, it is necessary to control and reduce the hydroxyl content in the quartz glass. The existing techno...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C03B20/00C03C3/06
CPCC03B20/00C03C3/06
Inventor 范艳层钱宜刚沈一春蒋新力许维维
Owner ZHONGTIAN TECH
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