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A kind of magnesium-based alloy modulated thin film and its preparation method and application

A technology of magnesium-based alloys and magnesium alloys, applied in metal material coating technology, vacuum evaporation plating, coating, etc., to achieve fast hydrogenation speed, large application value, and improved sensitivity

Active Publication Date: 2020-07-14
SHANGHAI JIAOTONG UNIV +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

So far, there have been no relevant reports on the modulation of alloy structures used in the field of sensors, so the research on the preparation of such structures and their hydrogenation properties is extremely valuable

Method used

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  • A kind of magnesium-based alloy modulated thin film and its preparation method and application
  • A kind of magnesium-based alloy modulated thin film and its preparation method and application
  • A kind of magnesium-based alloy modulated thin film and its preparation method and application

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Embodiment 1

[0054] The invention provides a magnesium-based alloy modulation film for a hydrogen sensor and a preparation method thereof, comprising the following steps:

[0055] (1) Prepare a mixture of concentrated sulfuric acid and hydrogen peroxide (3:1) as a cleaning solution, soak the substrate in the above solution for 10 minutes, then rinse it with deionized water, then ultrasonically clean it for 10 minutes, and finally blow it with nitrogen And placed in an oven to dry (50 ° C, 0.5h). Put the cleaned quartz glass substrate into the magnetron sputtering reaction chamber, and the placement position of the film is located on the sample stage ( figure 1 ) at the edge (r=7.6cm), turn on the vacuum system for vacuuming until the background vacuum of the deposition chamber is 6.67×10 -4 Pa;

[0056] (2) Introduce the working gas, turn on the power of the magnesium and gadolinium targets, and pre-sputter for 10 minutes to clean the targets. Set the sputtering power of the magnesium ...

Embodiment 2

[0063] The invention provides a magnesium-based alloy modulation film for a hydrogen sensor and a preparation method thereof, comprising the following steps:

[0064] (1) Prepare a mixture of concentrated sulfuric acid and hydrogen peroxide (3:1) as a cleaning solution, soak the substrate in the above solution for 10 minutes, then rinse it with deionized water, then ultrasonically clean it for 10 minutes, and finally blow it with nitrogen And placed in an oven to dry (50 ° C, 0.5h). Put the cleaned quartz glass substrate into the magnetron sputtering reaction chamber. The thin film is placed at 1 / 2 of the center and edge of the sample stage (r=3.8cm). Turn on the vacuum system to vacuum until the background Vacuum degree is 6.67×10 -4 Pa;

[0065] (2) Introduce the working gas, turn on the power of the magnesium and gadolinium targets, and pre-sputter for 10 minutes to clean the targets. Set the sputtering power of the magnesium and gadolinium targets to 100W and 50W respec...

Embodiment 3

[0070] The invention provides a magnesium-based alloy modulation film for a hydrogen sensor and a preparation method thereof, comprising the following steps:

[0071] (1) Prepare a mixture of concentrated sulfuric acid and hydrogen peroxide (3:1) as a cleaning solution, soak the substrate in the above solution for 10 minutes, then rinse it with deionized water, then ultrasonically clean it for 10 minutes, and finally blow it with nitrogen And placed in an oven to dry (50 ° C, 0.5h). Put the cleaned quartz glass substrate into the magnetron sputtering reaction chamber, place the film at the position of r=2.5cm on the sample stage, turn on the vacuum system to vacuumize until the background vacuum is 6.67×10 -4 Pa;

[0072] (2) Introduce the working gas, turn on the power of the magnesium and gadolinium targets, and pre-sputter for 10 minutes to clean the targets. Set the sputtering power of the magnesium and gadolinium targets to 200W and 100W respectively, the sputtering tim...

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Abstract

The invention discloses a magnesium base alloy modulated thin film and a preparation method and application thereof. The magnesium base alloy modulated thin film comprises a magnesium base alloy modulated layer, a catalyst layer and a polymer layer which are sequentially arranged; and elemental composition of the magnesium base alloy modulated layer is MgxM1-x, wherein x is greater than 0.5 and less than 1, and M is at least one of Gd, Ti, Ni, Mn, Fe, Co, Y, Nb, Ru, Zr, Ca, Ba, La, and Sm. The magnesium base alloy modulated thin film has the advantages of simple preparation process, low cost,wider practicality range and the like, a hydrogen sensor made of the magnesium base alloy modulated thin film is high in response speed and high in sensitivity, is not required to be warmed and forced, potential safety hazards do not exist, and recycling further can be achieved. In addition, the thin film optical performance change further can be realized by adjusting technological parameters, a hydrogen induced discoloration thin film with a larger optical conversion interval is obtained, and the magnesium base alloy modulated thin film has larger application value in other fields as well.

Description

technical field [0001] The invention relates to a magnesium-based alloy modulated thin film and its preparation method and application. The thin film has a hydrogen gas-induced discoloration function, has the advantages of fast hydrogenation response speed, long service life, and large optical conversion interval, and can be used for a hydrogen gas sensor. Background technique [0002] Hydrogen has broad application prospects in aerospace, military, automotive, medical and industrial fields due to its renewable, efficient and clean advantages. However, when the volume fraction of hydrogen in the air is 4%-75%, it is very easy to cause an explosion in case of an open flame. Furthermore, the colorless and odorless nature of hydrogen makes it difficult to be detected by humans, so it is of great significance to develop safe and sensitive hydrogen sensors. [0003] At present, the research on hydrogen sensors is divided into electrical signals and optical signals according to t...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/35C23C14/50B05D1/00C23C14/18C23C14/20
Inventor 陈娟邓南香彭立明刘越吴玉娟丁文江
Owner SHANGHAI JIAOTONG UNIV
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