SAW (surface acoustic wave) gyroscope based on standing wave mode

Abstract

The invention aims to provide an SAW (surface acoustic wave) gyroscope based on a standing wave mode. According to the SAW gyroscope based on the standing wave mode, a 128-degree Y-X cut LiNbO3 piezoelectric substrate with the high piezoelectric coupling coefficient, high SAW propagation speed and large acoustic-optical coupling coefficient is adopted; a metal dot matrix made of gold and an SAW receiving end in an acousto-optic reading mode are placed between resonant cavities of a dual-port resonator triggered by a receiving and transmitting antenna, so that a novel gyroscope in a standing wave mode is realized. Due to the design of the receiving and transmitting antenna, electronic circuit modules required by the SAW gyroscope can be effectively reduced, that is, the use of external circuits is reduced; and the SAW receiving end adopts a high-precision acousto-optic coupling mode to read out the change of the angular rate, so that the accuracy and the sensitivity of the SAW gyroscopeare improved.

Description

technical field [0001] The present application relates to the field of computers, in particular to a SAW gyroscope based on a standing wave mode. Background technique [0002] Gyroscopes have great application requirements in consumer products, industrial and medical products, especially in the military field, and performance parameters determine the field of use. Currently there are fiber optic gyroscopes, laser gyroscopes and micro-electro-mechanical system (Micro-Electro-Mechanical System, MEMS) gyroscopes. SAW gyroscopes have significant advantages such as small size, low cost, high two-dimensional structural stability, easy mass production, high sensitivity, and strong anti-vibration ability, and have a wider range of applications. [0003] At present, there are mainly two types of surface acoustic wave (Surface Acoustic Wave, SAW) gyroscopes: standing wave mode and traveling wave mode. The SAW gyroscope based on the standing wave mode consists of a piezoelectric subs...

AI Technical Summary

Problems solved by technology

[0004] The output signal of the standing wave mode SAW gyroscope is a microvolt-level electrical signal, and the measurement error range is large; the substrate is made of LiNbO 3 , although it has a high electromechanical coupling coefficient, but the large temperature coefficient will affect the instability of the device

Although the traveling wave mode SAW gyroscope uses a differential structure to achieve temperature compensation, because the Coriolis force directly affects the sound wave velocity, the quality of the metal lattice affects the sensitivity of the device. The sensitivity of the small mass does not meet the actual needs, and the large mass affects the sound wave propagation and increases the design cost. , the frequency change is also very small

Both modes have the problems of weak signal changes and complex circuits of the transceiver module, which will increase the formation of errors, the size of the device will also become larger, and the matching problem needs to be solved during the design process

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