Measurement system and measurement method of characteristic parameter of MEMS capacitive acceleration meter

Abstract

The invention discloses a measurement system and measurement method of a characteristic parameter of an MEMS capacitive acceleration meter. The measurement system comprises two parts: a balance capacitance bridge and a detection interface circuit, wherein the balance capacitance bridge consists of a first match capacitor Cref1, a second match capacitor Cref2 and an MEMS capacitive acceleration meter, and the detection interface circuit consists of a first electric charge amplifier, a second electric charge amplifier, an instrument amplifier, a spectrum analyzer, a first feedback capacitor Cf1,and a second feedback capacitor Cf2. The measurement system can drive and detect sensitive capacitance in the MEMS capacitive acceleration meter and separately extract different characteristic parameters. The electrical measurement method is based on an electrical measurement system, and can accurately measure the characteristic parameter of the MEMS capacitive acceleration meter according to accurate sensor gesture control, providing reference and guide for design of interface circuits in later period.

Description

technical field [0001] The invention belongs to the technical field of MEMS sensor characteristic testing, and relates to a system and a method for measuring characteristic parameters of a MEMS capacitive accelerometer. Background technique [0002] The characteristic parameters of MEMS accelerometer have important guiding significance for the design of the whole acceleration detection system. In the actual design, it is necessary to design and optimize the supporting interface circuit according to the characteristic parameters of the accelerometer at the system level. Especially for the closed-loop acceleration detection system, the characteristic parameters of the accelerometer directly affect the stability of the system. Inaccurate characteristic parameters will mislead the circuit design, cause the performance degradation of the system, and seriously lead to the shock and collapse of the system. Although the accelerometers are calibrated and screened at the factory, the...

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Problems solved by technology

Especially for the closed-loop acceleration detection system, the characteristic parameters of the accelerometer directly affect the stability of the system. Inaccurate characteristic parameters will mislead the circuit design, cause the performance degradation of the system, and seriously lead to the shock and collapse of the system

Although the accelerometers have been calibrated and screened at the factory, the characteristic parameters of each accelerometer are different, and the MEMS structure is sensitive to changes in the temperature environment, and it is prone to drift after long-term storage

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