Flexible temperature-sensitive pressure sensor based on nanoparticl lattice quantum conductance and assembly method and application thereof

Abstract

The invention discloses a flexible temperature-sensitive pressure sensor based on nanoparticl lattice quantum conductance and an assembly method and an application thereof. The sensor comprises a polymer polymer film, a metal nanoparticle lattice, a metal microelectrode and a conductance measuring external circuit; wherein at least one set of metal nanoparticle lattice are deposited on the upper and lower surfaces of a high-molecular polymer film, and the positions of the metal nanoparticle lattices on the upper and lower surfaces of each group are in one-to-one correspondence; the metal microelectrodes are disposed on both sides of each group of metal nanoparticle lattices, and are symmetrically distributed on the upper and lower surfaces of the high-molecular polymer film; and the conductance measuring external circuit is electrically connected to the metal microelectrode. The conductance response signal of the nanoparticle lattice of the invention has an exponential relationship with the particle spacing, and thus has an extremely sensitive response to pressure-induced deformation; the additional integrated temperature sensor is avoided, and a sensing structure is simplified; the impedance of the nanoparticle lattice is in the order of megaohms, and the power consumption is extremely small; and large-area production and package can be realized.

Description

technical field [0001] The invention belongs to the field of sensors and detection instruments, and relates to a wearable flexible sensor capable of measuring external pressure and ambient temperature at the same time. By comparing the magnitude of the conductance change of the nanoparticle lattice on the upper and lower surfaces of the flexible film, the value of the external pressure and temperature can be extracted. Minor changes, specifically a flexible temperature-sensitive pressure sensor based on nanoparticle lattice quantum conductance and its assembly method and application. Background technique [0002] Electronic skin is the latest wearable sensing device, which has extremely high application value in the fields of human behavior detection, life and health monitoring, artificial intelligence, and robotics. As a substitute for human skin, electronic skin also requires sensory capabilities such as touch, temperature, and pain under the premise of physical properties...

AI Technical Summary

Problems solved by technology

These three pressure sensors with different working modes have their own shortcomings: Among them, the electrical signal generated by the piezoelectric sensor only comes from the moment of pressure generation, and will not maintain its signal amplitude as the pressure is maintained. Therefore, the piezoelectric pressure sensor is greatly limited in practical applications; and the piezo-capacitive pressure sensor is much more complicated than the other two sensors because the electrical parameter it measures is capacitance. However, although the measurement external circuit of the piezoresistive pressure sensor is relatively simpler, its measurement resolution is limited, and the shortcomings such as insufficient sensitivity cannot be ignored.

However, it has not been researched and developed by simultaneously preparing a dense lattice of nanoparticles on the upper and lower surfaces of a flexible substrate and realizing the parallel measurement of pressure and temperature.

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