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High-entropy alloy film and preparation method thereof

A high-entropy alloy, thin-film material technology, applied in metal material coating process, vacuum evaporation coating, coating and other directions, can solve the problems of application limitation, processing and forming difficulties, high hardness and strength, etc.

Inactive Publication Date: 2019-02-15
SHENZHEN UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

At present, the preparation and research of high-entropy alloys are concentrated on bulk structural materials. Due to the large number of components of high-entropy alloy materials, the cost of industrial use is relatively high. On the other hand, due to the high hardness and strength of high-entropy alloy materials , making its processing and forming more difficult, especially in some parts with complex structures, the application is obviously limited

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  • High-entropy alloy film and preparation method thereof
  • High-entropy alloy film and preparation method thereof
  • High-entropy alloy film and preparation method thereof

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Embodiment Construction

[0031] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are some of the embodiments of the present invention, but not all of them. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0032] It should be understood that when used in this specification and the appended claims, the terms "comprising" and "comprises" indicate the presence of described features, integers, steps, operations, elements and / or components, but do not exclude one or Presence or addition of multiple other features, integers, steps, operations, elements, components and / or collections thereof.

[0033] It should also be understood that the terminology used ...

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Abstract

The invention discloses a CoCrFeNiAl 0.3 high-entropy alloy film and a preparation method thereof. The preparation method of the CoCrFeNiAl 0.3 high-entropy alloy film comprises the steps that a to-be-treated sample silicon substrate is cleaned, and the cleaned sample substrate is placed on a substrate heating device of pulse laser deposition equipment; a high-entropy alloy target is fixed to a target rotating motor of the pulse laser deposition equipment; a vacuum chamber of the pulse laser deposition equipment is vacuumized, so that the vacuum degree of the vacuum chamber reaches a preset vacuum value; film-plating experimental parameters of the pulse laser deposition equipment are set, and pulse laser pre-sputtering is conducted on the sample substrate; and the sample substrate is plated with the high-entropy alloy film according to the film-plating experimental parameters. By adoption of the CoCrFeNiAl 0.3 high-entropy alloy film and the preparation method thereof, the film preparation process is simplified, and the industrial application cost of high-entropy alloy is reduced; and meanwhile, the uniform-element high-entropy alloy film can be conveniently prepared on the surfaceof a complex-structure part, so that the strength, wear resistance and hardness of the part are improved, and the service life of the part is prolonged.

Description

technical field [0001] The invention relates to the technical field of new material preparation, in particular to a CoCrFeNiAl 0.3 High entropy alloy thin film material and its preparation method. Background technique [0002] In recent years, high-entropy alloys have become one of the new hotspots in the study of metal materials. Usually, high-entropy alloys are alloys formed by five or more metal elements in close to equiatomic ratios. They have good high temperature resistance, corrosion resistance, Excellent properties such as high strength and high toughness. At present, the preparation and research of high-entropy alloys are concentrated on bulk structural materials. Due to the large number of components of high-entropy alloy materials, the cost of industrial use is relatively high. On the other hand, due to the high hardness and strength of high-entropy alloy materials , making its processing and forming more difficult, especially in the application of some parts wi...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/28C23C14/14
CPCC23C14/28C23C14/14
Inventor 廖卫兵王峥卢添伟陈福发黎佩威廖凯雯刘正洋
Owner SHENZHEN UNIV
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