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Uncooled Infrared Polarization Detector Pixel Structure and Preparation Method

An uncooled infrared and pixel structure technology, which is applied in the direction of measuring the polarization of light, instruments, and measuring devices, can solve the problems of unrealized heat conduction isolation, low polarization detection efficiency, and increased heat capacity of the bridge deck to reduce technical complexity The effect of increasing the degree, expanding the size, and increasing the extinction ratio

Active Publication Date: 2021-03-02
北方广微科技有限公司
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  • Abstract
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  • Claims
  • Application Information

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Problems solved by technology

[0004] In the field of visible light and infrared detection, a large number of literatures have reported the method of preparing micro-gratings on the pixel. In the field of uncooled infrared imaging, a patent has reported a micro-polarization structure, but the grating layer and the thermal The sensitive layer is on the same micro bridge surface, and the thermal conduction isolation between the two is not realized. Therefore, on the one hand, the thermal noise of the grating layer is introduced, on the other hand, the heat capacity of the bridge surface is increased, and the polarization detection efficiency is low.

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  • Uncooled Infrared Polarization Detector Pixel Structure and Preparation Method

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Embodiment Construction

[0029] Exemplary embodiments of the present application will be described below with reference to the accompanying drawings. In the interest of clarity and conciseness, not all features of an actual implementation are described in this specification. It should be understood, however, that many implementation-specific decisions must be made in developing any such practical embodiment in order to achieve the developer's specific goals, such as compliance with those constraints related to the business of the system and the May vary from implementation to implementation. Furthermore, it should also be understood that, while potentially complex and time-consuming, such development would be a routine undertaking for those skilled in the art having the benefit of this disclosure. Here, it should also be noted that, in order to avoid obscuring the present invention with unnecessary details, only the device structure and / or processing steps closely related to the solution according to...

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Abstract

The application provides an uncooled infrared polarization detector pixel structure and a preparation method, wherein the uncooled infrared polarization detector pixel structure includes: a bottom layer, the bottom layer includes a readout circuit base and a The first metal electrode layer on the seat, the metal reflective layer and the first dielectric protection layer; the intermediate layer, the intermediate layer includes the first support layer, the heat sensitive layer, the second dielectric protection layer, the second metal electrode layer and the third Dielectric protection layer; upper layer, the upper layer includes a second support layer disposed on the third dielectric protection layer and a grating layer disposed on the second support layer, the grating layer includes several sequentially arranged raster. The pixel structure and preparation method of the uncooled infrared polarization detector provided by the application has a greatly reduced volume, reduces the thermal noise introduced by the grating layer, improves the polarization detection sensitivity, and is beneficial to increase the extinction ratio of the grating layer.

Description

technical field [0001] The present application relates to the field of MEMS process manufacturing in semiconductor technology, and in particular to an uncooled infrared polarization detector pixel structure and a preparation method. Background technique [0002] Infrared polarization detection is a technology that increases the information dimension by obtaining the polarization information of each point on the basis of infrared intensity detection. It can not only obtain the infrared intensity information of the target in two-dimensional space, but also obtain the polarization information of each point on the image. By using the increased polarization dimension, the difference between the camouflaged and dim targets and the background can be enhanced, which is conducive to improving the detection and identification capabilities of targets. [0003] The current common infrared polarization detection methods include time-division method, amplitude-division method, aperture-di...

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01J4/00
CPCG01J4/00G01J4/04
Inventor 张连东李煜赵永强潘泉
Owner 北方广微科技有限公司
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