Miniature spatial hydrogen detection microsensor and preparation method thereof

Abstract

The invention discloses a miniature spatial hydrogen detection microsensor. A palladium-nickel resistance hydrogen sensor is prepared by adopting a palladium-nickel alloy as a hydrogen sensitive material; the processing technology is simple and the integration is easy, the defects of the over-adsorption and trailing phenomena and falling of a sensitive film by using pure palladium as the hydrogensensitive material are effectively solved. The palladium-nickel hydrogen sensitive material is designed as a graphical broken-line wire-like film structure; compared with the pure palladium structure,more sensitive sites can be produced inside a palladium-nickel hydrogen sensitive film, and a hollow cavity and a recess are produced in a microstructure, the specific surface area of the palladium-nickel hydrogen sensitive film is increased to a certain degree, a higher signal strength can be obtained, other hydrogen sensors are incomparable under the same conditions; the sensor belongs to an important constituent part of spatial hydrogen atom in-situ miniature detector, can be carried on a micro-nano satellite platform, can detect the hydrogen atom density with an extremely low density, andis low in power consumption, small in size and light in weight.

Description

technical field [0001] The invention belongs to the technical field of gas concentration detection, and in particular relates to a miniature space hydrogen detection microsensor and a preparation method thereof. Background technique [0002] The abundance of H element in the space environment is 95%. The detection of H element has important academic value and scientific significance for revealing the origin of the universe, verifying the big bang theory and the cosmic redshift theory. Atomic hydrogen is the most important neutral component in the atmospheric composition of the upper space environment, and its composition changes are of great significance to the physics of the upper atmosphere and solar physics, for example, atmospheric chemistry, the coupling process of plasma and neutral particles, magnetic The energy dissipation process of the layer and the geomagnetic storm are related to it. In addition, as the lightest neutral component in the atmosphere, atomic hydrog...

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Problems solved by technology

However, due to the characteristics of light weight, small size, low power consumption and short life of the micro-nano satellite, it has strict restrictions on the volume, weight and power consumption of the payload.

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