Extrinsic fabry-perot interferometer ultrasensitive gas sensor based on channel structure of tungsten selenide film

Abstract

The invention belongs to the sensing field and in particular relates to an extrinsic fabry-perot interferometer ultrasensitive gas sensor based on a channel structure of a tungsten selenide film. A tungsten selenide-gold conductive structure is integrated on the end surface of a single mode fiber by adopting a mature and stable sensing principle and combining advanced processes in optics, metamaterial subjects and micro-nano machining. By means of physical absorption and electric adjustable characteristics of tungsten selenide, gas molecules are adsorbed and released by regulating a voltage applied to tungsten selenide. Response speed and sensitivity of the sensor are considered, and meanwhile, the apparatus is small in size, good in thermal stability and relatively small in power consumption of sensing. The response time of the sensor is only 0.01% of that of an electrochemical gas sensor, the sensitivity of the sensor can reach over 1000 times of that of a conventional optical gas sensor, and the power consumption of sensing is reduced to 100 nanowatt. The sensor can be directly integrated to a full optical system to achieve high speed information sensing of a full optical network.

Description

technical field [0001] The invention belongs to the field of sensing, and in particular relates to an optical fiber peroxide ultrasensitive gas sensor based on a tungsten selenide film channel structure, which can detect the gas concentration by detecting the drift of the transmission spectrum. Background technique [0002] With the continuous improvement of people's living standards and the increasing emphasis on environmental protection, the detection of various toxic and harmful gases, the monitoring of air pollution, industrial waste gas, and the detection of food and living environment quality have put forward more and more requirements for gas sensors. high demands. The successful application of new material development technologies such as nanometer and thin film technology provides a good prerequisite for the integration and intelligence of gas sensors. High-performance gas sensors can greatly improve the level of information collection, processing, and deep process...

AI Technical Summary

Problems solved by technology

[0005] In view of the above existing problems or deficiencies, in order to solve the problems of existing gas sensors with low cost, simple structure, small size, good controllability, high sensitivity and low power consumption, the present invention provides a channel based on tungsten selenide film The fiber-optic peroxide ultrasensitive gas sensor of the structure realizes the adsorption and release of gas by modulating the voltage of the tungsten selenide film, and then realizes the high-sensitivity sensing of trace gas molecules in the outside world

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