Line width narrowing module with aligning device and excimer laser

Abstract

The invention discloses a line width narrowing module with an aligning device. The line width narrowing module comprises a prism group, a photodiode, an optical oscilloscope and an angle adjusting device; the prism group is used for reflecting the fluorescent light of a discharge chamber so as to generate reflected fluorescent light; the photodiode is used for receiving the reflected fluorescent light and responding to the reflected fluorescent light; the optical oscilloscope is connected with the photodiode and is used for observing the signal strength of the photodiode; the angle adjusting device is used for adjusting the angle of the line width narrowing module, and completing the alignment of the line width narrowing module with the discharge chamber when the signal strength of the photodiode is the strongest. In addition, the invention provides an excimer laser and a method for aligning the line width narrowing module with the discharge chamber. With the line width narrowing module with the aligning device, the method and the excimer laser of the invention adopted, the problem of the alignment of the line width narrowing module with the chamber can be solved; with the alignment device adopted, the rapid installation and replacement of the line width narrowing module can be realized, and maximum energy output can be realized with spectral output characteristics ensured.

Description

technical field [0001] The invention relates to the field of laser technology, in particular to a line width narrowing module with an alignment device, an excimer laser, and an alignment method between the line width narrowing module and a discharge cavity. Background technique [0002] The line width narrowing module is an important part of the excimer laser used in lithography. By cooperating with the discharge chamber, the line width narrowing module can realize functions such as spectrum narrowing and central wavelength tuning, and the fineness of the semiconductor silicon wafer chip pattern can be guaranteed through the sub-picometer line width. [0003] The method of combining the prism group 1 with the grating 2 is a widely used spectrum control method at present. figure 1 It is a schematic diagram of the basic structure of the linewidth narrowing module of the excimer laser system, mainly including the prism group 1 and the grating 2. The prism group 1 performs one...

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Problems solved by technology

It can be seen that the line width narrowing module also loses more laser energy while realizing line width narrowing

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