Micro-disk Raman laser device and manufacturing method thereof
A Raman laser and manufacturing method technology, applied in the laser field, can solve the problems of low etching accuracy and poor repeatability, and achieve the effects of improving etching accuracy, facilitating on-chip integration, and strong process repeatability
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[0038] The present invention will be further described in detail below with reference to the drawings and embodiments. It can be understood that the specific embodiments described here are only used to explain the present invention, but not to limit the present invention. In addition, it should be noted that, for ease of description, the drawings only show a part but not all of the structure related to the present invention.
[0039] The embodiment of the present invention provides a method for manufacturing a microdisk Raman laser, reference figure 1 , figure 1 It is a schematic flow chart of a method for manufacturing a microdisk Raman laser provided by an embodiment of the present invention. The method for manufacturing a microdisk Raman laser includes:
[0040] S101. Coating photoresist on a substrate; wherein the substrate includes a semiconductor base, and an oxide semiconductor layer is formed on the semiconductor base.
[0041] reference figure 2 , figure 2 It is a schemat...
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