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A kind of whispering gallery mode photonics device supported by pillars and its preparation method and application

A photonics and pillar technology, applied in the field of photonics devices, can solve problems such as the inability to realize the arrayed multi-microcavity structure, the difficulty in realizing the photonics circuit, and the cumbersome process, and achieve high repeatability, low cost, and simple preparation process Effect

Active Publication Date: 2020-04-07
INST OF CHEM CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

These methods face the problems of cumbersome process and high energy consumption.
More importantly, the existing methods cannot realize the preparation of arrayed and patterned multi-microcavity structures, and it is difficult to realize functional whispering gallery mode photonic circuits

Method used

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  • A kind of whispering gallery mode photonics device supported by pillars and its preparation method and application
  • A kind of whispering gallery mode photonics device supported by pillars and its preparation method and application
  • A kind of whispering gallery mode photonics device supported by pillars and its preparation method and application

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0058] Example 1: Dye-doped microdisk with support structure produces whispering gallery mode micron laser

[0059] Such as Figure 4 As shown, the whispering gallery mode micro-laser material is a micro-disk array structure (1) with a supporting structure provided by the inventor, and the pulse laser (2) (430 nanometers) of a titanium-doped sapphire laser is used as the pump light, and the spot diameter is 30 Micron, with a light intensity of 145 microwatts, irradiating a single part of the microdisk array structure supported by pillars, so that the dye doped in it emits light to form a gain. The overflow light of the microdisk cavity is collected through a 50 times objective lens (3), and the excitation light is filtered out by an optical filter (4) (520 nm long pass) to obtain the multimode laser (5) generated by the whispering gallery mode microcavity.

[0060] The preparation method of the microdisk array with support structure used in the method is as follows:

[0061]...

Embodiment 2

[0063] Example 2: Microdisk coupled cavity with pillar support realizes single-mode laser

[0064] The material used is the micro-disk array structure provided by the inventor, and the pulsed laser (430 nanometers) of a titanium-doped sapphire laser is used as the pump light, and the spot diameter is 40 microns. The dye in it emits light to form the gain. The overflow light of the microdisk cavity is collected through a 50x objective lens, and the excitation light is filtered out with a filter (520 nm long pass) to obtain the laser spectrum of the whispering gallery mode microcavity. By adjusting the diameters of the two coupling disks and using the "vernier effect" formed by the coupling of two different microdisk cavities, the resonant modes at the same wavelength position are selectively amplified, and the laser mode selection function is realized to obtain a single-mode laser.

[0065] The preparation method of the coupled microdisk array with support structure used in th...

Embodiment 3

[0068] Example 3: Multi-microdisk array used in coupled cavity optical waveguide components

[0069] The material used is the microdisk coupled cavity optical waveguide structure (including 9 microdisks) supported by pillars provided by the inventor, and the pulse laser (430 nanometers) of a titanium-doped sapphire laser is used as the pump light, and the diameter of the light spot is 20 microns. The entire coupled microdisk array structure is irradiated at 45 degrees, so that the dye doped in it emits light to form a gain. The overflow light of the microdisk cavity at the end is collected through a 50 times objective lens, and the excitation light is filtered out with a filter (520 nm long pass). The laser signal of the microdisk at the beginning can be collected at the end through the conduction of 8 microdisks.

[0070] The preparation method of the multi-microdisk array used in this method is as follows:

[0071] The preparation method of the coupled microdisk array with ...

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Abstract

The invention belongs to the photonics device field and relates to a supporting column-supported echo wall mode photonics device, a preparation method thereof and the use of the device. In particular,the present invention provides a supporting column-supported micro disk. The supporting column of the supporting column-supported micro disk comprises a first electron beam resist; the micro disk comprises a second electron beam resist; and the molecular weight of the first electron beam resist is lower than that of the second electron beam resist. The supporting column-supported micro disk, a micro disk array structure, an echo wall mode optical resonant micro-cavity and a photonics device of the invention have the advantages of simple preparation process, convenient operation and low cost,and can be prepared on a large scale, have high quality factors and spectral modulation functions. With the preparation method adopted, a problem that a substrate needs to be separately etched in a traditional high-quality micro-cavity preparation process can be solved; and the coupling effect of a plurality of micro-cavities can be realized. The method has high practicability, and is especially suitable for the design and application of photonics integrated components.

Description

technical field [0001] The invention belongs to the field of photonic devices, and in particular relates to a whispering gallery mode photonic device supported by pillars, a preparation method and application thereof. Background technique [0002] Existing computers use electrons to transmit and process information. However, due to the interference of electronic thermal effects and quantum effects, the integration density is limited and cannot meet the higher requirements for information storage and processor performance. The development of the information age urgently requires the research and development of high-performance integrated optical devices to solve the problems of operating speed limitations and small-scale thermal effects faced by integrated electronics. Compared with the traditional Fabry-Perot (FP) cavity, the whispering gallery mode microcavity exhibits a higher quality factor and thus enables higher-resolution modulation of the transmission or luminescence...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01S3/08C09D133/12G03F7/004
CPCC09D133/12G03F7/004H01S3/08
Inventor 赵永生张春焕董海云
Owner INST OF CHEM CHINESE ACAD OF SCI
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