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AlCrSiN nano-composite coating resistant to high temperature and abrasion and preparation method thereof

A nano-composite coating, high-temperature wear-resistant technology, applied in the high-temperature wear-resistant AlCrSiN nano-composite coating and its preparation, pulse arc ion plating to prepare high-temperature wear-resistant AlCrSiN nano-composite coatings, can solve the problem that the deposition temperature is not accurate High requirements on control and bias power supply equipment, poor process stability and other problems, to achieve the effects of droplet control, excellent high temperature stability, and fast deposition speed

Active Publication Date: 2018-11-13
GUANGDONG UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, this type of method has the disadvantages of arc ion plating technology: large particle pollution; relatively high deposition temperature; large internal stress of the film; easy to cause micro-arcing, etc.
Moreover, this type of method also has disadvantages such as high requirements for bias power supply equipment, inaccurate control of deposition temperature, and poor process stability.

Method used

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  • AlCrSiN nano-composite coating resistant to high temperature and abrasion and preparation method thereof
  • AlCrSiN nano-composite coating resistant to high temperature and abrasion and preparation method thereof
  • AlCrSiN nano-composite coating resistant to high temperature and abrasion and preparation method thereof

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Experimental program
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Effect test

Embodiment 1

[0038] The high-temperature and wear-resistant AlCrSiN nanocomposite coating is prepared by pulse arc ion plating, and its preparation includes the following steps:

[0039] 1) Polish the substrate, ultrasonically clean it with acetone and alcohol for 10 minutes, dry it with general nitrogen, and put it into a vacuum chamber.

[0040] 2) Put the substrate in the chamber, turn on the heater to raise the temperature of the chamber to 300-500°C, and evacuate the vacuum chamber to 5.0×10 -3 Pa; Then, feed 200 sccm argon and 50 sccm krypton, set the workpiece turret bias to -800V, and frequency 240kHz, and perform pulse etching on the substrate surface for 10 min; then, feed 150 sccm argon and 100 sccm krypton again, Set the bias voltage of the workpiece turret to -200V, the ion source current to 30A, and use the ion source to etch the substrate for 40 minutes;

[0041] 3) Adjust the bias voltage to -150V, feed 400sccm argon gas, ignite the Cr target, adjust the air pressure to 1P...

Embodiment 2

[0049] The high-temperature and wear-resistant AlCrSiN nanocomposite coating is prepared by pulse arc ion plating, and its preparation includes the following steps:

[0050] 1) Polish the substrate, ultrasonically clean it with acetone and alcohol for 10 minutes, dry it with general nitrogen, and put it into a vacuum chamber.

[0051] 2) Place the substrate in the chamber, turn on the heater to raise the temperature of the chamber to 300-500°C, and evacuate the vacuum chamber to 4.0×10 -3 Pa; then, feed 100 sccm argon and 100 sccm krypton, set the workpiece turret bias to -700V, and frequency 240 kHz, and perform pulse etching on the substrate surface for 10 min; then, feed 150 sccm argon and 50 sccm krypton again, Set the bias voltage of the workpiece turret to -200V, the ion source current to 30A, and use the ion source to etch the substrate for 45 minutes;

[0052] 3) Adjust the bias voltage to -90V, feed 400sccm argon gas, ignite the Cr target, adjust the air pressure to ...

Embodiment 3

[0060] The high-temperature and wear-resistant AlCrSiN nanocomposite coating is prepared by pulse arc ion plating, and its preparation includes the following steps:

[0061] 1) Polish the substrate, ultrasonically clean it with acetone and alcohol for 10 minutes, dry it with general nitrogen, and put it into a vacuum chamber.

[0062] 2) Place the substrate in the chamber, turn on the heater to raise the temperature of the chamber to 300-500°C, and evacuate the vacuum chamber to 5.0×10 -3 Pa; then, feed 100 sccm argon and 100 sccm krypton, set the workpiece turret bias to -700V, and frequency 240 kHz, and perform pulse etching on the substrate surface for 10 min; then, feed 150 sccm argon and 50 sccm krypton again, Set the bias voltage of the workpiece turret to -200V, the ion source current to 30A, and use the ion source to etch the substrate for 45 minutes;

[0063] 3) Adjust the bias voltage to -90V, feed 400sccm argon gas, ignite the Cr target, adjust the air pressure to ...

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Abstract

The invention belongs to the technical field of coating preparation and particularly relates to an AlCrSiN nano-composite coating resistant to high temperature and abrasion and a preparation method thereof. According to the AlCrSiN nano-composite coating resistant to high temperature and abrasion and the preparation method thereof, a pulsed arc ion plating method is adopted; and a Cr interface implantation layer, a CrN transition layer and an AlCrSiN surface functional layer are sequentially deposited on the surface of a base body from bottom to top. Experimental results show that the AlCrSiNnano-composite coating obtained through the preparation method is excellent in high-temperature stability and abrasion resistance and has the advantages of being small in number of surface large particles, low in internal stress, high in film base bonding strength and the like; and the AlCrSiN nano-composite coating is applicable to surface protection of products such as mechanical parts, tools and molds.

Description

technical field [0001] The invention belongs to the technical field of coating preparation, and in particular relates to a high-temperature wear-resistant AlCrSiN nano-composite coating and a preparation method thereof, in particular to a method for preparing a high-temperature wear-resistant AlCrSiN nano-composite coating by pulse arc ion plating. Background technique [0002] Synthetic nanocomposites, as a protective coating with unique properties, have been a novel thin-film material over the past three decades. To date, several hard coatings based on nanocomposites have been successfully developed and applied in engineering applications. [0003] The main disadvantage of nitride coatings in high temperature applications is that they are limited due to their poor oxidation resistance. In order to increase its high temperature stability, aluminum content is introduced into the coating. In the study of T.Polcar et al. (T.Polcar, T.Vitu, J.Sondor, A.Cavaleiro, Tribological...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/32C23C14/06
CPCC23C14/0641C23C14/325
Inventor 王启民钟星吴正涛代伟伍一铭
Owner GUANGDONG UNIV OF TECH
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