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Excimer laser intelligent washing equipment

The technology of excimer laser and excimer laser is applied in the field of excimer laser intelligent cleaning equipment, which can solve the problem of not being able to meet high-efficiency cleaning, and achieve the effect of preventing damage and high-efficiency cleaning.

Pending Publication Date: 2018-10-19
中山普宏光电科技有限公司
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  • Abstract
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  • Claims
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AI Technical Summary

Problems solved by technology

General laser cleaning cannot meet the requirements of efficient cleaning

Method used

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  • Excimer laser intelligent washing equipment

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Embodiment Construction

[0023] Below, in conjunction with specific embodiment, the present invention is described further:

[0024] Such as figure 1 As shown, the excimer laser intelligent cleaning equipment described in the present invention includes an excimer laser 1, an optical system 2, a mirror 3, a workbench 5 and a complete machine control system 6, and the ultraviolet laser emitted by the excimer laser 1, First pass through the optical system 2 and then reflect to the workbench 5 through the reflector 3. The workbench 5 is used to fix the workpiece 4 to be cleaned, and the control system 6 controls the cleaning working state and process of the equipment.

[0025] As a further solution, the excimer laser 1 of the present invention outputs ultraviolet laser light with a wavelength of 308nm, 248nm, 193nm or 157nm. Different substances absorb different wavelengths of ultraviolet lasers in different degrees, and different wavelengths are selected according to the degree of contamination of the w...

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Abstract

The invention relates to the technical field of laser washing, and discloses an excimer laser intelligent washing equipment by using the excimer laser as a washing light source. The equipment is composed of an excimer laser device, an optical system, a controlling system and a workbench. According to the excimer laser intelligent washing equipment, the ultraviolet band laser output by the excimerlaser device is shaped by the optical system, then transmitted and irradiated to the surface part of the workpiece needing to be washed, the washed substance is eliminated by means of the physical andchemical effects of the washed substance on the surface of the workpiece through the ultraviolet laser, and the purpose of washing the workpiece is achieved; and the excimer laser intelligent washingequipment has the characteristics of being without grinding and contacting, high in laser energy density, small in thermal effect and the like, meanwhile, the ultraviolet wavelength laser can effectively wash the special materials such as the impurities and the pollution which cannot be washed by other wavelength laser and is efficient, high-quality and high-targeted washing equipment.

Description

technical field [0001] The invention relates to the technical field of ultraviolet laser cleaning, in particular to excimer laser intelligent cleaning equipment. Background technique [0002] Optical cleaning is a new type of efficient environmental cleaning technology based on the interaction effect between light and matter. Optical cleaning has the characteristics of no grinding, non-contact, small thermal effect and suitable for objects of various materials. It is considered to be reliable, effective and Environmentally friendly cleaning technology. Due to its unique wavelength characteristics, ultraviolet light has an irreplaceable effect on the cleaning of some special substances that other wavelengths of light can not replace. Because most organic substances have a strong absorption ability to ultraviolet light, and after absorbing the energy of ultraviolet light, they decompose or resynthesize into volatile gases and leave the surface of the object to be cleaned to a...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B08B7/00B08B13/00
CPCB08B7/0042B08B7/0057B08B13/00
Inventor 马跃方晓东朱能伟梁勖游利兵
Owner 中山普宏光电科技有限公司
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