Micro-fluidic chip for researching growth and reproduction of algae
A microfluidic chip and algae technology, which is applied in the field of microfluidic chips for studying the growth and reproduction of algae, can solve the problems of uneven diffusion of nutrient solution, accumulation of harmful metabolites, etc. Automatic real-time monitoring of recording effects
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[0032] (1) Substrate preparation: The single crystal silicon wafer was cleaned in Piranha solution (98% concentrated sulfuric acid: 30% hydrogen peroxide) for 15 minutes to deoxidize, rinsed with deionized water, dried with nitrogen, and baked at 200 ° C for 30 minutes.
[0033] (2) Spin the glue: put the prepared substrate on the spin coating position of the high-pressure adsorption spin coating machine (Spin-Coater KW-4A, ChematTechnology, Inc.), pour AZ 50XT series glue on the center of the substrate, and rotate at 2000r / min for 2min , let it stand for 10 minutes to reduce the air bubbles on the surface of the silicon wafer.
[0034] (3) Pre-baking: Place the glue-coated silicon wafer on a heating plate at 65°C, 90°C, and 65°C for 2 minutes, 7 minutes, and 2 minutes.
[0035] (4) Exposure: Place the mask of the sample pipeline layer and the valve control layer on the spin-coated substrate, and expose it with a UV exposure machine.
[0036] (5) Development: The development ...
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