Preparation method of optical waveguide type minicircle resonant cavity humidity sensor coated with TiO2 thin film

Abstract

The invention belongs to the optical field and the field of micro-nano systems, and particularly relates to a preparation method of an optical waveguide type minicircle resonant cavity humidity sensorcoated with a TiO2 thin film. The optical waveguide type minicircle resonant cavity humidity sensor includes photoetching on an annular resonant cavity, straight waveguide and input and output grating and coating on the TiO2 thin film on a waveguiding structure. By means of the unique ambulatory mode effect of a minicircle resonant cavity prepared on the SOI waveguide, an optical wave performs resonance in a minicircle, the stable resonance phenomenon can be observed by means of a spectrometer, when the relative humidity of the external world changes, a humidity sensitive thin film absorbs water, the resonant cavity refractive index changes, and then an output spectral line observed on the spectrometer performs wave length shift, and measurement of the humidity is completed. Compared withan ordinary humidity sensor, the optical waveguide type minicircle resonant cavity humidity sensor has the advantages of being easy to operate, low in cost, small in volume, short in reaction time, high in flexibility and not prone to electromagnet interference, and therefore the sensor has the extremely high application value.

Description

technical field [0001] The invention belongs to the field of optics and the field of micro-nano system, specifically a TiO coated 2 A thin-film optical waveguide microring resonator humidity sensor is prepared. Background technique [0002] Humidity, as one of the most difficult and important environmental parameters to detect, has important applications in weather forecasting, environmental testing, agricultural production, semiconductor device processing, food storage, textiles, power generation, aerospace, locomotives and ships, etc. Traditional humidity sensors mainly include capacitance, resistance, surface acoustic wave and other types. These sensors have disadvantages such as large size, long response time, low sensitivity, susceptibility to electromagnetic interference, and the need for moisture-sensitive coatings. In recent years, people have increasingly higher requirements for the miniaturization and integration of traditional humidity sensors. [0003] The op...

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Problems solved by technology

[0004] In view of the current traditional humidity sensor's large volume, long response time, low sensitivity, susceptible to electromagnetic interference, and unable to adapt to extremely harsh environments

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