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Optical-path sensitive-type accelerometer

An accelerometer and sensitive technology, applied in the direction of measuring acceleration, multi-dimensional acceleration measurement, speed/acceleration/impact measurement, etc., can solve the problems of high cost, large three-axis orthogonality error, and large volume, and achieve low cost and measurement Improved resolution and smaller size

Active Publication Date: 2018-07-27
GUANGXUN SCI & TECH WUHAN
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The three-axis accelerometer formed by the assembly method will lead to a large three-axis orthogonality error, large volume and high cost

Method used

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  • Optical-path sensitive-type accelerometer
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  • Optical-path sensitive-type accelerometer

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0042] Embodiment 1 of the present invention provides an optical path-sensitive accelerometer, including a light source 2 , a photodetector 3 , a lens 4 and a first MEMS chip, wherein the first MEMS chip includes a mirror 6 , a support beam 7 and a mass 8 ; The mirror 6 is arranged on the mass block 8, and the mass block 8 is connected with the support beam 7, and under the action of acceleration, the support beam 7 causes the mass block 8 to be displaced along the Z-axis direction;

[0043] The lens 4 is placed between the plane where the light source 2 and the photodetector 3 are located and the plane where the reflector 6 is located;

[0044] The photodetector 3 is used to receive the light generated by the light source 2 , the optical path adjusted by the lens 4 , and finally reflected back by the reflector 6 .

[0045] The invention provides an optical path sensitive accelerometer, which utilizes the optical path loss caused by the axial displacement of the reflecting mir...

Embodiment 2

[0054] In many applications, it is necessary to monitor three-dimensional acceleration at the same time. Traditional accelerometers are mainly single-axis sensors. Three single-axis accelerometers need to be assembled to form a three-dimensional accelerometer, which will result in a large error in three-axis orthogonality and a large volume. ,high cost. In order to overcome this technical problem, this Embodiment 2 makes some improvements on the basis of Embodiment 1, so that not only the acceleration in the Z direction can be measured by the displacement of the mass block 8 , but also X and Y can be measured by the rotation of the mass block 8 directional acceleration, that is, three-dimensional acceleration can be monitored simultaneously without assembly. The main difference from Embodiment 1 is that in Embodiment 2, the PD array 10 is used to replace the original photodetector 3 to detect the position and shape of the light spot; at the same time, the X-axis support beam 1...

Embodiment 3

[0067] In order to better understand the principle of the optical path-sensitive accelerometer of the present invention, on the basis of Embodiment 2, Embodiment 3 provides a specific use and measurement method of the above-mentioned accelerometer. An optical path-sensitive accelerometer provided in this embodiment 2 uses a PD array to receive reflected light, and the moving path of the light spot and the size of the light spot can be detected. It is mainly used for simultaneous measurement of acceleration in three-dimensional directions, that is, X, Y and Z directions. Among them, the rotation of the mass block 8 along X and Y will cause the position of the light spot to change, while the shape of the light spot is basically unchanged; the displacement of the mass block 8 in the Z direction will cause the mirror 6 to deviate from the focal plane of the lens 4, and then reflect The spot size onto the PD array 10 changes.

[0068] The measurement and use method of the accelero...

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Abstract

The invention relates to the field of speed measurement, in particular to an optical-path sensitive-type accelerometer. The accelerometer comprises a light source, a photoelectric detector, a lens anda first MEMS chip. The first MEMS chip comprises a reflection mirror, a supporting beam and a mass block; the reflection mirror is arranged on the mass block, the mass block is connected with the supporting beam, and the supporting beam makes the mass block move in the Z-axis direction under the acceleration effect; the lens is arranged between the plane where the light source and the photoelectric detector are located and the plane where the reflection mirror is located; the photoelectric detector is used for receiving light which is generated by the light source, focused by the lens and reflected back by the reflection mirror. According to the optical-path sensitive-type accelerometer, the acceleration value is measured by using optical path loss caused by axial displacement of the reflection mirror, the accelerometer is simple in structure, small in size, easy to process and low in cost, and the resolution ratio is remarkably increased. Meanwhile, the accelerometer improved on thebasis can be applied to three-dimensional measurement, the chip is simple in design and high in resolution ratio, and the defects of large orthogonality error and large size in traditional design areovercome.

Description

【Technical field】 [0001] The invention relates to the field of velocity measurement, in particular to an optical path sensitive accelerometer. 【Background technique】 [0002] An accelerometer is a sensor that measures the acceleration of an object, and its measurement principle is based on Newton's second law. The displacement of the mass block in the accelerometer has a definite relationship with the magnitude of the acceleration received, and the corresponding acceleration value can be measured by measuring the displacement. Micro Electro Mechanical Systems (MEMS for short) accelerometers have the characteristics of small size, light weight, low power consumption, high precision and low mass production cost. Currently, they are mainly used in motion sensing, motion recognition, attitude control, and vibration detection. , security alarm, etc. [0003] The current mainstream MEMS accelerometers are capacitive. The accelerometer calculates the corresponding acceleration b...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01P15/18G01P15/093
CPCG01P15/093G01P15/18
Inventor 卜勤练王震郑洁赵慧王敏
Owner GUANGXUN SCI & TECH WUHAN
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