Three-axis micro-gyroscope based on tuning fork driving effect

Abstract

The invention discloses a three-axis micro-gyroscope based on a tuning fork driving effect, which comprise an upper-layer gyroscope structure and a lower-layer glass substrate, the upper-layer gyroscope structure comprises a left mechanical structure, a right mechanical structure, a middle mechanical structure, an upper crossbeam, a lower crossbeam, short beams, and anchor points, a turning mechanism based on tuning fork driving is designed in the middle mechanical structure, X-axis simple harmonic driving and Y-axis simple harmonic driving of sensitive weights of the middle mechanical structure are realized by the X-axis unidirectional driving of the left mechanical structure and the right mechanical structure, and thereby the consistency of driving frequencies between different axes is ensured. When angular velocity is inputted from outside, the sensitive weights receives Coriolis force to shift. By adopting a double-sensitive weight design and variable-interval capacitance differential detection, the three-axis micro-gyroscope can inhibit the common-mode interference of temperature, structural stress, acceleration and the like; the structure of the three-axis micro-gyroscope issymmetrically arranged, the stability is good, and the anti-interference capability is high.

Description

technical field [0001] The invention relates to a micro-electromechanical system and a micro-inertial device, in particular to a three-axis micro-gyroscope based on a tuning fork driving effect. Background technique [0002] Different from traditional inertial devices, MEMS (MicroElectroMechanical Systems, micro-electromechanical systems) micro-inertial devices have unique advantages such as small size, light weight, low cost, low energy consumption, high reliability, easy digitization, and can meet harsh environment applications. Broad civilian prospects and important military value. [0003] MEMS three-axis micro-gyroscope is an important member of MEMS micro-inertial devices. It also has the above advantages. Its application range includes ordinary consumer goods, industrial stable platforms, micro-nano satellites, stable aiming and image stabilization systems, and unmanned combat platforms. [0004] The traditional integration method of three single-axis gyroscopes requ...

AI Technical Summary

Problems solved by technology

[0004] The traditional integration method of three single-axis gyroscopes requires three closed-loop drive resonant circuit control, the control circuit is complex, and signal crosstalk is prone to occur between multiple drive circuits

The integration of three single-axis gyroscopes will increase the volume of the sensor, which is not conducive to miniaturization

[0005] In addition, there is still a large gap between the accuracy and integration of domestic single-chip integrated three-axis gyroscopes compared with foreign advanced technologies, which greatly limits the development and application of domestic micro-inertial devices

Images