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Ultra-thick DLC coating

A coating and ultra-thick technology, which is applied in the fields of ultra-thick DLC coating and its preparation, DLC coating and its preparation, and vacuum PVD coating, can solve problems such as the inability to achieve the ideal thickness of DLC coating, and achieve the goal of suppressing grains. The effects of growth, excellent wear resistance, and convenience for large-scale mass production

Pending Publication Date: 2018-05-25
SUZHOU CHAMPION COATING TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, none of the above methods can achieve the ideal thickness of the DLC coating that can meet the needs of practical applications.

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0028] see figure 1 , the ultra-thick DLC coating in Embodiment 1 includes a soft layer 11 directly formed on the surface of the base material, and a hard layer 12 directly formed on the soft layer, and the soft layer 11 and the hard layer 12 are formed alternately on the surface of the base material. The DLC coating formed by multi-period deposition of a double-layer modulation structure consisting of a soft layer and a hard layer has a thickness of 23 μm, a hardness of 30-40 GPa, a friction coefficient of 0.06-0.10, and a modulation period of 0.15-0.90 μm. The internal stress can be controlled below 1.5Gpa, and the bonding force with the surface of the base material is 81N. In this modulated structure, the soft layer 11 is CrN with a thickness of 0.05-0.10μm, and the hard layer 12 is diamond-like carbon with a thickness of 0.10-0.80μm. . see figure 2 , it can be observed that the interface of the modulated structure of the ultra-thick DLC coating is flat and dense, and t...

Embodiment 2

[0040] see image 3 , the ultra-thick DLC coating in Example 2 includes soft layers 21 directly formed on the surface of the base material, and hard layers 22 directly formed on the soft layer, and the soft layers 21 and hard layers 22 are alternately formed on the base material surface. The DLC coating formed by multi-period deposition of a double-layer modulation structure consisting of a soft layer and a hard layer has a thickness of 16 μm, a hardness of 26-36 GPa, a friction coefficient of 0.06-0.10, and a modulation period of 1.50-2.80 μm. The internal stress is only 3.7GPa, and the bonding force with the surface of the base material is 76N. In this modulated structure, the soft layer 21 is CrN with a thickness of 0.50-0.80 μm, and the hard layer 22 is diamond-like carbon with a thickness of 1.00-2.00 μm. . see Figure 4 , it can be observed that the interface of the modulated structure of the ultra-thick DLC coating is flat and dense, and the brightness of each layer ...

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Abstract

The invention discloses an ultra-thick DLC coating. The ultra-thick DLC coating comprises a double-layer modulation structure periodically arranged on the surface of a base material, wherein the modulation structure comprises a soft layer and a hard layer which is laid on the soft layer, and the soft layer and the hard layer are alternately arranged on the surface of the base material in a periodic mode. The ultra-thick DLC coating not only can solve the problem that a film layer is automatically cracked due to the internal high stress when a thickness of a hard phase is increased, but also can greatly improve the overall hardness of the film layer, and meanwhile, the ultra-thick DLC coating has excellent wear resistance, so that application prospect is wide; and meanwhile, according to the preparation method, the modulation period of the soft layer-hard layer double-layer modulation structure or the period number of the soft layer-hard layer double-layer modulation structure are adjusted, the DLC coating with the specific thickness is prepared to meet the actual production requirements, and the operation process is simple and facilitates large-scale batch production.

Description

technical field [0001] The invention relates to a DLC coating and a preparation method thereof, in particular to an ultra-thick DLC coating and a preparation method thereof. The technology involved is vacuum PVD coating and belongs to the field of surface treatment. Background technique [0002] Surface treatment is a treatment method widely used for surface modification of materials and workpieces, including heat treatment, electroplating, spraying, and vacuum coating. In recent years, thanks to the development of vacuum coating technology, the multilayer composite film prepared by it has attracted more and more attention and attention because of its special properties. In this type of composite thin film structure, the periodically arranged repeating structural units constituting the composite thin film are usually called a modulation structure, and the thickness of the modulation structure is called a modulation period. [0003] DLC (diamond-like carbon) film is one of t...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C28/00C23C28/04C23C14/06C23C14/14C23C14/32C23C14/35C23C16/26C23C16/44
CPCC23C14/0605C23C14/0641C23C14/14C23C14/325C23C14/35C23C16/26C23C16/44C23C28/046C23C28/322C23C28/343C23C28/40
Inventor 陈君乐务时
Owner SUZHOU CHAMPION COATING TECH
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