Capacitive flexible touch sensor and manufacturing method thereof
A tactile sensor, capacitive technology, used in instruments, measuring devices, measuring forces, etc., can solve problems such as damage, large force, and insufficient sensor sensitivity
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[0035] In order to make the objectives, technical solutions and beneficial effects of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments It is only some embodiments of the present invention, but not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts fall within the protection scope of the present invention.
[0036] A capacitive flexible tactile sensor, including a plurality of sensing units arranged in M rows*N columns, each sensing unit includes a surface raised layer 1, a floating plate 3, and a dielectric layer that are sequentially bonded and connected. 4 and the lower capacitive plate layer 5, the horizontal section of each sensing ...
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