Hybrid plasma generator for processing silicon-based material

Abstract

A hybrid plasma generator for processing a silicon-based material comprises a DC plasma generator and a radio frequency induction coupling plasma generator. Compared with a conventional radio frequency coupling plasma generator for processing the silicon-based material, the hybrid plasma generator has the following remarkable advantages that 1, the processing efficiency is high, arc plasma jet issimulated secondarily under an effect of an induction coil magnetic field, more energy is obtained within unit time to simulate working gas, so that the number of reaction active particles in unit volume is increased; 2, the ignition process is optimized, ignition is completed through an electric spark generated by a negative electrode part and a positive electrode part, and the problem that a quartz glass tube is easy to damage during the ignition process of a traditional radio frequency induction coupling plasma generator is solved; and 3, the surface quality of the silicon-based material after being processed is improved, the plasma jet with constant beam spot diameter is maintained for a long time under the condition that a setting parameter is not changed, and the certainty processingof a material surface is achieved.

Description

technical field [0001] The invention discloses a hybrid plasma generator used for processing silicon-based materials, which belongs to the field of plasma processing equipment. Background technique [0002] In recent years, silicon-based ultra-precision parts have become more and more widely used in aerospace, astronomical observation and other fields, and the demand is increasing. Requirements such as degenerated layers and subsurface damage. In order to achieve the above goals, plasma excitation such as CF 4 A kind of trajectory surface processing method dominated by active reactive particles generated by working gas has received great attention from researchers at home and abroad. [0003] At present, the way to excite the working gas to generate active reactive particles mainly relies on radio frequency inductively coupled plasma generators. This method can excite the working gas to generate active reactive particles, and rely on the chemical reaction between the acti...

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Problems solved by technology

This method can excite the working gas to generate active reactive particles, and rely on the chemical reaction between the active reactive particles and the silicon-based material to generate gas phase products, which can avoid surface deterioration and subsurface damage on the processed surface, but in the induction coil area, The Lorentz force will induce a strong swirling eddy current, resulting in unstable shape of the plasma jet at the jet port of the device during the processing, unable to obtain a constant beam spot diameter, and the quality of the processed surface cannot reach the ideal goal; and there are The skin effect of the current, the high temperature area deviates from the axis of the quartz glass tube, and the energy is not fully coupled into the plasma jet, resulting in low processing efficiency

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