Laminated body and method for producing the laminated body
A manufacturing method and a laminated body technology, which are applied in photolithography exposure devices, microlithography exposure equipment, instruments, etc., can solve the problems of external light reflection, high metal reflectivity, and visual recognition of metal electrodes on touch panels, etc. Achieve the effect of little effect of color mixing
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[0296] (Preparation method of positive type composition)
[0297] The positive type composition can be prepared by blending the above-mentioned components at predetermined ratios, followed by mixing and stirring by a normal method. In addition, if necessary, further filtration may be performed using a mesh, a membrane filter, or the like.
[0298] Next, the substrate 10 having the coating film 12 formed as described above is subjected to an exposure step.
[0299]
[0300] image 3 (c)~ image 3 In (f), the case where a positive photosensitive composition was used as a photosensitive resin composition was illustrated. When using a negative photosensitive resin composition as the photosensitive resin composition, a photomask 15 capable of blocking exposure light 16 irradiated to a position other than the position of the metal wiring 18 can be used.
[0301] In the case of using a positive photosensitive composition as the photosensitive resin composition, in the exposure ...
Embodiment 1
[0361] 100 parts by mass of Novolac resin, 13 parts by mass of a sensitizer, 22.6 parts by mass of a quinonediazide group-containing compound, and 27 mass % of a pigment relative to the mass of the total solid content were uniformly dissolved and dispersed in propylene glycol monomethyl In the base ether acetate, the solid content concentration was adjusted to 20% by mass to obtain a positive tone composition.
[0362] It should be noted that in the positive type composition, 1% by mass of 2-hydroxyethylpyridine and 0.4% by mass of silicon-based surfactant ( BYK-310, manufactured by BYK Chemie).
[0363] As the Novolac resin, a cresol-type Novolac resin having a weight average molecular weight of 4700 and a degree of dispersion of 4.5 was used.
[0364] As the sensitizer, a phenolic resin (trade name: TrisP-PA-MF, manufactured by Honshu Chemical Industry Co., Ltd.) was used.
[0365] As a compound containing a quinonediazide group, a product obtained by esterifying 2,3,4,4'-...
Embodiment 2
[0380] The Novolac resin was changed to a cresol-type Novolac resin with a weight average molecular weight of 4700 and a degree of dispersion of 10.0, except that a positive-type composition was prepared in the same manner as in Example 1, and it was operated in the same manner as in Example 1 to obtain A laminated body consisting of metal wiring and a colored resin layer is formed on a substrate.
[0381] The optical density of the formed covering resin layer was 0.60 / μm.
[0382] In addition, when the shape of the formed colored resin layer was observed with a microscope, the film thickness of the colored resin layer was substantially uniform, and when the surface of the substrate on which the metal wiring was formed was observed from a direction perpendicular to the surface, the upper part of the pixel was not covered. The colored resin layer was covered, and metal wiring was not exposed.
[0383] For the formed laminate formed by the metal wiring and the colored resin lay...
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