Micro ultra-wideband photodetector based on graphene and production method thereof

Abstract

The invention discloses a micro ultra-wideband photodetector based on graphene. The micro ultra-wideband photodetector comprises a monocrystalline silicon substrate; a stress layer formed on the monocrystalline silicon substrate; and a heterojunction formed on the stress layer, wherein the heterojunction comprises a gate electrode, a first graphene layer, a dielectric layer, a second graphene layer, a source electrode which is parallel to and equidistant from the gate electrode, and a drain electrode layer structure, which are orderly arranged; the stress layer makes the heterojunction to be self-assembled into a microtube three-dimensional structure; and a current measurement loop is formed on the above structure. The invention further discloses a production method of the micro ultra-wideband photodetector based on the graphene. The three-dimensional microtube structure can greatly reduce the occupied area of chips, improve the light absorption rate and light utilization efficiency of the monolayer graphene, and greatly improve the responsivity of graphene photodetectors.

Description

technical field [0001] The invention relates to the technical field of photodetectors. More specifically, it relates to a miniature ultra-broadband photodetector and a manufacturing method thereof. Background technique [0002] A photodetector is an optical power measurement device that converts optical signals into electrical signals. It can detect the optical power incident on its surface and convert the change of this optical power into a corresponding current. Among them, the ultra-broadband light detector realizes ultra-broadband light detection by integrating multiple detectors suitable for different wave bands, and can simultaneously detect electromagnetic wave radiation in different wave bands such as ultraviolet, visible light, infrared and even terahertz waves. Imaging, remote sensing, environmental monitoring, astronomical detection, spectral analysis and many other fields play a very important role. However, since most ultra-broadband photodetectors realize ult...

AI Technical Summary

Problems solved by technology

However, due to the limitation of its detection principle, the enhancement of responsivity only occurs in the band that resonates with quantum dots or microcavities, that is, the detection spectral range is extremely limited, which seriously limits its application in the field of broadband detection.

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