Application for taking thin film transistor with adjustable threshold voltage as nonvolatile memory
A thin-film transistor and threshold voltage technology, which is applied in the field of semiconductor non-volatile memory, can solve the problems of small storage window, affecting the working speed of the device, and low erasing efficiency of charge-type NVM, so as to enhance storage performance and improve reliability. Effect
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[0015] A thin film transistor with adjustable threshold voltage is used as a non-volatile memory. The thin film transistor with adjustable threshold voltage includes a substrate 10, a bottom gate 11 disposed on the substrate 10, disposed on the substrate 10 and covering The bottom gate oxide layer 12 of the bottom gate 11, the channel layer 13 arranged on the bottom gate oxide layer 12, the source electrode 14 and the drain electrode 15 arranged on opposite sides of the channel layer 13 are arranged on the channel layer 13 and the tunneling layer 21 on the source 14 and the drain 15, the storage layer 22 on the tunneling layer 21, the barrier layer 23 on the storage layer 22, and the top gate 17 on the barrier layer 23, The top gate 17 is located directly above the bottom gate 11 . Wherein, the channel layer 13 is indium gallium zinc oxide, and the equivalent oxide layer thickness T of the bottom gate oxide layer is BOX , The equivalent oxide layer thickness T of the channel ...
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