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Aluminium nitride ceramic substrate, and preparation method thereof

A technology of aluminum nitride ceramics and aluminum nitride, applied in the field of materials, can solve problems such as human body and environmental hazards, and achieve the effects of reducing environmental pollution and harm to human body, reducing production costs, and high thermal conductivity.

Inactive Publication Date: 2017-09-22
RENMIN UNIVERSITY OF CHINA
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] The tape-casting AlN process uses an organic solvent matrix, and many of them contain toxic solvents such as benzene and ketones, which are harmful to the human body and the environment

Method used

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  • Aluminium nitride ceramic substrate, and preparation method thereof
  • Aluminium nitride ceramic substrate, and preparation method thereof
  • Aluminium nitride ceramic substrate, and preparation method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0047] Embodiment 1, the preparation of AlN ceramic casting slurry

[0048] According to the solid content of 58%, accurately weigh 80.0025g AlN, 3.7650g Y 2 o 3 , 45.4965g absolute ethanol, 15.2274g isopropanol, 2.6823g triethyl phosphate and 0.6701g oleic acid, sintering aid 0.3228g CaCO 3 , 0.1795gSiO 2 and 0.0606g Al 2 o 3 Powder; place the weighed powder in a ball mill jar, add alumina grinding balls with 3 times the quality of the powder (aluminum nitride powder and sintering aid), fully stir and mix with a planetary ball mill, The ball milling time was 24 hours. Then, 8.3768g PVB, 1.2582g ethylene glycol, 4.1910g PAG and 4.1928gBBP were added, and the ball milling time was continued for 24 hours with a planetary ball mill to obtain AlN ceramic casting slurry.

Embodiment 2

[0049] Embodiment 2, the preparation of AlN ceramic casting slurry

[0050] 1) According to the solid content of 58%, accurately weigh 80.0020g AlN, 3.7640g Y 2 o 3 , 45.5025g absolute ethanol, 15.1749g isopropanol, 2.6805g triethyl phosphate, 0.6724g oleic acid, 0.3745g CaCO sintering aid 3 and 0.2099gSiO 2 Powder: place the weighed powder in a ball mill jar, add alumina grinding balls with 3 times the mass of the powder (solid powder), fully stir and mix with a planetary ball mill, and the ball milling time is 24 hours. Then, 8.3765g PVB, 1.2572g ethylene glycol, 4.1893g PAG and 4.1998g BBP were added, and the ball milling time was continued for 24 hours with a planetary ball mill to obtain AlN ceramic casting slurry.

Embodiment 3

[0051] Embodiment 3, the preparation of AlN ceramic substrate

[0052] 1) According to the solid content of 58%, accurately weigh 80.0020g AlN, 3.7639g Y 2 o 3 , 45.4935g absolute ethanol, 15.1636g isopropanol, 2.6822g triethyl phosphate, 0.6720g oleic acid, 0.8378g CaF 2 Powder; place the weighed powder in a ball mill jar, add alumina grinding balls with 3 times the quality of the powder (aluminum nitride powder and sintering aid), fully stir and mix with a planetary ball mill, The ball milling time was 24 hours.

[0053] 2) Secondary ball milling: 8.3767g PVB, 1.2766g ethylene glycol, 4.1887g PAG and 4.1890gBBP were added to 1), and ball milling was continued for 24 hours with a planetary ball mill to obtain AlN ceramic casting slurry.

[0054] 3) Vacuum defoaming: Vacuum defoaming the mixed slurry in step 2) for defoaming, using a vacuum defoaming machine with a stirring speed of 50r / min, a pressure of -0.08Mpa, and a vacuum defoaming time of 15min.

[0055] 4) The slur...

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Abstract

The invention discloses an aluminium nitride ceramic substrate, and a preparation method thereof. The aluminium nitride ceramic substrate is prepared from an aluminium nitride ceramic tape casting slurry. The aluminium nitride ceramic tape casting slurry comprises aluminium nitride powder, a sintering air, a dispersant, a solvent, a plasticizer, a binder, and a defoaming agent. The preparation method comprises following steps: 1, primary ball milling is carried out; 2, secondary ball milling is carried out; 3, vacuum defoaming is carried out; 4, an obtained mixed slurry obtained via step 3 is subjected to tape casting, is subjected to heating on a film band, is cooled naturally, and is peeled off from the film band so as to obtain aluminium nitride tape casting sheets; 5, the aluminium nitride tape casting sheets are overlapped so as to obtain an aluminium nitride green body; 6, additive removing is carried out so as to obtain an aluminium nitride blank; and 7, sintering is carried out so as to obtain aluminium nitride ceramic. According to the preparation method, aluminium nitride is obtained via tape casting of a benzene-free, ketone-free, nontoxic organic solvent, and the sintering aid is added, so that the aluminium nitride ceramic substrate can be obtained via sintering at a relatively low temperature.

Description

technical field [0001] The invention relates to an aluminum nitride ceramic substrate and a preparation method thereof, belonging to the field of materials. Background technique [0002] Aluminum nitride (AlN) ceramics has excellent thermal conductivity, excellent physical and chemical stability, and is non-toxic, insulating, and has a thermal expansion coefficient similar to that of silicon (Si). It is an ideal substrate material for high-density electronic packaging, especially in high-power The field of high energy density LED lighting has great application prospects. Many research institutes and companies at home and abroad are developing or have developed AlN substrates with high thermal conductivity. The thermal conductivity of AlN products in industrial production (theoretical value 320W / (m·K)) is generally below 200W / (m·K). At present, the forming methods of AlN ceramics include organic tape casting, dry pressing and hot pressing. Tape casting is most suitable. ...

Claims

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Application Information

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IPC IPC(8): C04B35/581C04B35/622C04B35/638C04B35/64B28B1/29B28B11/24B28B17/02
CPCC04B35/581B28B1/29B28B11/243B28B17/026C04B35/622C04B35/638C04B35/64C04B2235/3225C04B2235/6562C04B2235/6567C04B2235/658C04B2235/77C04B2235/94C04B2235/95C04B2235/9607
Inventor 曹永革麻朝阳文子诚
Owner RENMIN UNIVERSITY OF CHINA
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