A method and device for rapidly preparing graphene patterns with double beams
A graphene and double-beam technology, applied in metal material coating process, coating, gaseous chemical plating, etc., can solve the problems affecting the edge quality of graphene graphics, expensive continuous lasers, and high laser power density. Achieve the effect of shortening the preparation time, fast preparation speed and good edge quality
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[0024] The following specific implementation methods will be combined with the attached Figure 1~2 The present invention is further described.
[0025] like figure 1 Shown is a specific embodiment of the device described in the present invention. The device includes a pulsed laser unit 1, a continuous laser unit 2, a dichroic mirror 3, a beam shaping and focusing unit 4, a vacuum chamber 5, a gas flow control unit 6, a three-axis precision translation stage 7, and an air-floating shock-isolation optical platform 8 .
[0026]The pulsed laser unit 1 includes a pulsed laser 11 , a first laser shutter 12 and a mirror 13 . The pulsed laser 11 is a nanosecond pulsed fiber laser with a power of 10W, a wavelength of 1064nm, and a pulse width of 1 nanosecond. The pulsed laser 11 is equipped with a controller so that the power and pulse repetition frequency are adjustable. The adjustment range is 0.1Hz ~ 1000Hz. The action time of the laser shutter 12 is less than 1 millisecond. W...
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