Quartz pendulum accelerometer and preparation method thereof

Abstract

The invention discloses a quartz pendulum accelerometer, which comprises an upper pole plate, a middle pole plate and a lower pole plate, wherein each of the upper pole plate and the lower pole plate comprises a bonding region, a capacitor plate region and a capacitor lead region; the bonding region surrounds the periphery of the capacitor plate region; one end of the capacitor lead region is suspended and the other end passes through the bonding region and is connected with the capacitor plate region; the thickness of the bonding region is greater than that of the capacitor plate area; the middle pole plate is formed by a bonding region, a mass block, a flexible beam and an electrode lead region; the bonding region is annular; the mass block is fixedly connected with the inner side of the bonding region through the flexible beam; one end of the electrode lead region is suspended and the other end passes through the bonding region and is connected with the mass block; and the upper pole plate, the middle pole plate and the lower pole plate are connected into a whole through the bonding regions thereof. The quartz pendulum accelerometer is simple in structure, the same material is utilized, precise machine assembly is not needed, and the reliability and the manufacturability can be improved.

Description

technical field [0001] The invention relates to the technical field of micro-electromechanical systems, in particular to a quartz pendulum accelerometer and a preparation method thereof. Background technique [0002] Capacitive accelerometers realized by micro-electro-mechanical systems (MEMS) technology have the advantages of small size, light weight and low cost, and have broad application prospects in military, automotive technology, consumer electronics and other fields. There are three main types of current capacitive accelerometers: "sandwich" structure, "comb tooth" structure and quartz flexible pendulum structure. Among them, the "sandwich" structure and "comb tooth" structure accelerometers are made of silicon materials, which are easy to process. However, silicon materials are semiconductor materials and are easily affected by temperature and impurity pollution. Therefore, the stability of the devices needs to be further improved. The quartz flexible pendulum stru...

AI Technical Summary

Problems solved by technology

Among them, the "sandwich" structure and "comb tooth" structure accelerometers are made of silicon materials, which are easy to process. However, silicon materials are semiconductor materials and are easily affected by temperature and impurity pollution. Therefore, the stability of the device needs to be further improved.

The quartz flexible pendulum structure accelerometer utilizes the excellent mechanical elasticity, temperature characteristics, high quality factor and chemical stability of the quartz material. Although the measurement accuracy is high and the performance is stable, the structure is relatively complicated and involves multiple components and materials. Through precision machinery Assembled together, the reliability and manufacturability are poor, and it faces the problems of permanent magnet degradation, glue aging and difficulty in further improving the measuring range

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